We can handle various reactions such as PVD, plasma CVD, and etching!
The "Surface Shape Simulation Module (FPSM2D)" is a module that calculates the temporal changes of the substrate and deposited film by considering various reactions on the substrate surface using the particle Monte Carlo method. It can accommodate any reactions, including PVD, plasma CVD, and etching. The incident particle information (particle flux, incident energy, and angle distribution) can be obtained from the output of the PEGASUS gas phase module and PEGASUS surface science module, or specified by the user using the input methods provided by this product. 【Features】 - Uses the particle Monte Carlo method to express shapes while considering solid layer occupancy and surface coverage through a cell method. - Does not use the sharp interfaces characteristic of the cell method; instead, it determines the incident angle from the gradient of solid layer occupancy and applies it to the angle-dependent specular reflection probability and reaction probability. - There are no limitations on the number of gas species, reaction formulas, complexes, or polymers. - Defined on a two-dimensional orthogonal mesh, but the initial shape can be given as an arbitrary shape. *For more details, please refer to the PDF materials or feel free to contact us.*
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basic information
【Function List (Partial)】 ■Application Areas: Surface shape simulation in processes such as PVD, plasma CVD, and dry etching ■Analysis Methods: Monte Carlo method, cell method ■Target Dimensions: 2D ■Solver: Driver FPSM2D / Module FPSM2D ■Coordinate System: 2D Cartesian coordinates ■Mesh Shape: Rectangular ■Boundary Conditions: Diffuse reflection, specular reflection, physical and chemical reactions ■GUI Features: Uses the attached GUIM (PNG file output, print output, text data input/output, arbitrary zooming of display screen) ■Analysis Scale: Unlimited (limited by memory capacity and computation time in practice) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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We are an independent company that aims to develop and sell software for analyzing physical phenomena in the fields of vacuum, plasma, rarefied gases, and gas electronics. We consider creativity, development capability, technical expertise, and competitiveness as our corporate spirit.
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