High-performance laser lithography equipment for research and development.
The "DWL 66+" is a high-resolution laser direct writing system suitable for research and development applications, small lot production, mask creation, and maskless exposure. It is equipped with the necessary functions for the fabrication and analysis of microstructures as a standard system. With high processing capability and a wide range of applications, it contributes to research and development in applications requiring microstructure fabrication, such as MEMS and micro-optics. 【Features】 ■ For maskless exposure and mask creation ■ 2.5D grayscale exposure mode (standard 128 levels, optional 255 levels or 1000 levels) ■ Versatile with rich features and expandability for multiple applications ■ Switchable up to six drawing modes (0.3um-4.0um) (pixel size) ■ High-precision alignment with backside alignment capability ■ Maximum substrate size supported is 9 inches x 9 inches ■ Compatible with various data formats *For more details, please refer to the catalog or feel free to contact us.
Inquire About This Product
basic information
【Example of Drawing Mode】 ■Drawing Mode: HR (High Resolution Mode 0.3um) ■Minimum Address Grid (nm): 5 ■Minimum Drawing Size (μm): 0.3 ■Edge Roughness (3σ, nm): 50 ■CD Uniformity (3σ, nm): 60 ■Overlay Accuracy (3σ, nm): 500 *For more details, please refer to the catalog or feel free to contact us.
Price range
P8
Delivery Time
Applications/Examples of results
【Applications】 ■ Small lot mask creation ■ Maskless exposure, laser direct writing, laser direct drawing, 2.5D grayscale exposure ■ Patterning for semiconductors, FPD, sensors, MEMS, microchannels, micro-optics, waveguides, DOE, holograms, and other applications requiring microstructure fabrication *For more details, please refer to the catalog or feel free to contact us.
catalog（4）
Download All Catalogs
Company information
Heidelberg Instruments, Inc. is the Japanese subsidiary of Heidelberg Instruments Mikrotechnik, a German company that develops and manufactures laser direct writing systems and mask writing systems. We provide sales and technical services for laser direct writing systems within Japan. We offer a wide range of products, including laser writing systems and maskless aligners. For anything related to laser lithography, please feel free to consult with us.