Continuous monitoring of ultra-low concentration TOC in ultrapure water for the semiconductor and electronics industries! This is an online TOC analyzer using a reagent-free "gas permeable membrane conductivity measurement method."
The online TOC analyzer Sievers M500e is the third generation of online TOC analyzers that has developed Sievers' long-standing analytical technology in the electronics industry. It adopts Sievers' reagent-free gas-permeable membrane conductivity measurement technology, achieving accuracy, reproducibility, and stability of TOC below 1 ppb. ● Removal of interfering ions using gas-permeable membrane conductivity measurement method ● Significant reduction in running costs due to reagent-free measurement ● Up to 50% reduction in analysis time (compared to the previous model) It is the successor model to the Sievers 500RLe. It enhances accuracy and efficiency, supporting the stable production of ultra-pure water (UPW).
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basic information
- Total Organic Carbon (TOC) Measurement Principle: Ultraviolet oxidation + gas permeable membrane conductivity measurement method Measurement Range: 0.03 to 2,500 ppb TOC Accuracy: ± 5% or ±0.1 ppb, whichever is larger Reproducibility: 1% or 0.03 ppb, whichever is larger Measurement Time: 3 minutes (for continuous online measurement) Sample Flow Rate (normal): 0.25 mL/min Sample Water Flow Rate: 50 mL/min or more Sample Temperature: 1 to 95°C, resistant to short-term steam exposure Sample Water Pressure: Up to 100 psig Interfering Substances: Not affected by coexisting ions other than organic matter Calibration Stability: Typically stable for 12 months Display: 3-digit significant figures - Equipment Power Requirements: 100 to 240 VAC, 70W, 50/60 Hz Normal Operating Environment: Indoor only Ambient Temperature: 5 to 40°C Humidity: Up to 95%, no condensation Dimensions: 435 (H) × 475 (W) × 284 (D) mm Weight: 13.6 kg IP Protection Rating: IP55
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Applications/Examples of results
Electronics Industry - Confirmation that ultrapure water meets TOC management values - Guaranteeing complete recovery of organic substances, especially in environments that are difficult to oxidize - Utilizing data on organic compounds present in raw water/ultrapure water production equipment/production processes for prevention/quality protection/troubleshooting - Preventing yield reduction by detecting organic contaminants that affect lithography Boiler Equipment - Detection of low-concentration organic contaminants such as sugars, detergents, coolants, and organic acids using TOC - Reducing equipment downtime by ensuring the quality of boiler feed water - Protecting polishing equipment by detecting contamination in heat exchangers - Avoiding equipment shutdown and damage by detecting corrosive organic acids
Detailed information
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- Sievers' unique gas permeable membrane conductivity measurement method In the TOC measurement method for conductivity, the conductivity indicated by the carbon dioxide (carbonate ions) produced after the oxidation and decomposition of organic matter is measured to calculate the carbon concentration. The Sievers M500e employs a "gas permeable membrane module," which uses a thin film of Teflon to separate carbon dioxide from the sample water into the pure water line within the analyzer, enabling accurate TOC measurements by eliminating the influence of other ions.
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- Accurate measurements unaffected by coexisting ions The sources of organic contamination in ultra-pure water are diverse, including urea, acetic acid, isopropanol, and trimethylamine. The Sievers M500e accurately detects organic contaminants and ensures the quality of ultra-pure water.
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- Acceleration Rinse: Double the Speed After protocol completion, a fast rinse-down is performed to maximize operating time and low-concentration data collection capabilities. ✓ Rinse time is halved compared to conventional methods ✓ High-precision measurements even after maintenance or replacement of consumables
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- Low Concentration Calibration & Verification Protocol Calibration is performed using standard solutions with concentration certificates, close to the operating range, and verification is conducted with difficult-to-decompose compounds. ✓ Calibration (250 ppb KHP) ✓ Verification (100 ppb IPA)
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- Adaptive Auto Zero Automatically determines the TOC auto zero cycle based on changes in TOC offset ✓ Accuracy and stability below 1 ppb for TOC ✓ Matching between different devices ✓ Manual setting of the auto zero cycle is not required
Line up（1）
| Model number | overview |
|---|---|
| SPRD78130-01 | Sievers TOC Analyzer Model M500e <Standard iOS included> |
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Company information
Since our establishment in 1967, we have been dedicated to the development and dissemination of water quality measurement devices that anyone can use quickly, easily, and with high precision. In today's world, where the effective use of water, a limited resource, is required alongside environmental conservation, we aim to be a total solution provider that responds to all water environments by utilizing our water quality measurement devices, technology, and services. Furthermore, leveraging the latest technology and years of know-how, we are committed to delivering user-friendly and reliable water quality measurement devices more affordably, quickly, and widely.
