Dry in / dry out is possible! Equipment for mirror finishing of silicon wafers.
The "MGP-808XJ" is a fully automatic CMP device that is the successor to the Lap Master SFT's "LGP-808XJ." It adopts a newly developed head by our company, achieving improvements in GBIR and SFQR on the wafer surface. The transport method is either edge clamp or edge contact. Additionally, it allows for dry in/dry out capabilities through integration with a cleaning machine. 【Features】 ■ Successor model to the Lap Master SFT's "LGP-808XJ" ■ Achieves improvements in GBIR and SFQR on the wafer surface ■ High throughput with 8 polishing heads and 3 polishing plates ■ All transport systems use either edge clamp or edge contact methods ■ Allows for dry in/dry out capabilities through integration with a cleaning machine *For more details, please refer to the PDF document or feel free to contact us.
Inquire About This Product
basic information
For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Purpose】 ■ For mirror finishing of silicon wafers *For more details, please refer to the PDF document or feel free to contact us.
catalog（1）
Download All Catalogs
Company information
Micron Technology Co., Ltd. has been engaged in the manufacturing and sales of manufacturing equipment for electronic components and chemical products that support science and technology since its establishment. Moving forward, we aim to continue refining new technologies through collaboration among industry, academia, and government, with a focus on the environment, creating new value, leveraging our overseas networks, promoting global standards, and contributing, even in a small way, to the improvement of cultural life.