Application-Specific Problem Solving Case: Semiconductor Manufacturing Equipment

Adoption of a unique structure with low resistance metal contacts! A case that achieved several thousand volts of voltage plus a compact slip ring.

We would like to introduce our application-specific problem-solving case study on "Semiconductor Manufacturing Equipment." In addition to accommodating high voltages in the thousands of volts range, there were also size limitations due to equipment space constraints, which posed the issue that accommodating high voltage typically requires larger equipment. To address this, we adopted a unique structure for the metal contacts that minimizes resistance, and replaced almost all components used in the slip ring with materials that have significantly higher insulation properties than usual. Furthermore, by customizing the processing of components and the internal structure to special specifications, we were able to keep the size to a minimum. 【Case Overview】 ■ Challenges - Accommodating high voltage typically requires larger equipment. ■ Results - Achieved both high voltage accommodation in the thousands of volts range and compactness. *For more details, please refer to the PDF document or feel free to contact us.

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