Close Contact With the Part to Be Heated, and Contribute to Energy Saving "Flexible Planar Heater"

We are pleased to announce that the "Flexible Surface Heater iCas MHE" from Hakawa Corporation has been demonstrated to have over 20% energy-saving performance compared to conventional mantle heaters in the Environmental Technology Verification (ETV) project conducted by the Ministry of the Environment. In the technical verification tests, a reduction of approximately 42% has been confirmed*. This product takes advantage of its ability to heat in close contact with the heated object, enabling efficient heat transfer compared to conventional heaters, and is expected to contribute to reducing environmental impact. To objectively evaluate this feature, the product was selected as a verification target technology under the Ministry of the Environment's ETV project, and verification was conducted by a third-party organization. During the verification, measurements of power consumption and other factors were taken under conditions simulating actual operation, confirming that the characteristic of heating in close contact with the heated object allows for efficient transmission of heating energy. Additionally, it was demonstrated that the entire surface generates heat uniformly, enabling stable heating with minimal temperature differences throughout the piping. *Refer to the Ministry of the Environment ETV project website for the list of verified technologies, verification reports, and summaries.

The breathable heater component "iCas MCT," developed by Hakusen Corporation, has been adopted in Nikon Corporation's semiconductor exposure equipment. This equipment is scheduled to be sold starting in December 2026. Semiconductor exposure equipment requires technology that can form complex and fine electronic circuit patterns on silicon wafers with high precision while also contributing to improvements in productivity and energy efficiency. Even slight temperature fluctuations can affect pattern accuracy, making high-precision and rapid temperature control in the exposure equipment essential, measured in mK (milliKelvin) units. The breathable heater component "iCas MCT" has been adopted for the first time in semiconductor exposure equipment. The "iCas MCT" is a heater component that uses a paper-like, porous structure made of "stainless steel fiber sheet" as the heating element. By incorporating breathability into the heater component and allowing air to pass vertically through the heating surface, it effectively heats while minimizing thermal capacity, achieving high temperature responsiveness and heating performance. Additionally, it contributes to the miniaturization and lightweight design of components, as well as the high performance of semiconductor exposure equipment.

We will be exhibit at "Neo Functional Material 2026," which will be held from Wednesday, January 28 to Friday, January 30, 2026. We look forward to seeing you at our booth. [Exhibited Products] -Gap-free, flexible radiation shielding material "Tungsten Powder Holding Sheet" -Durable lightweight sheet material for harsh environments "Stainless Fiber Sheet Filter" -The "snap-in" structure streamlines the installation of heaters on small-diameter pipes "Half-split Heater for Small-diameter Pipes" -Thin and strong adhesion, available from 5µm "Thermo-setting Electrical Insulation Film SJ41" -Improved sealing performance for insert materials "Sealing Tape HT56 for Insert Molding"

We will exhibit at SEMICON Japan 2025 from Dec. 17 (Wed) to 19 (Fri), 2025. We look forward to seeing you at our booth. [Exhibited Products] - Performs reliably in environments up to 350℃ "350℃ Heat-resistant Removable Electrical Insulating Adhesive Tape" - Achives 25% energy savings compared to glass wool products "High-performance Insulation Sheet & Insulation Jackets" - The "snap-in" structure streamlines the instllation of heaters on small-diameter pipes "Half-spilt Heater for Small-diameter Pipes" - Heater + insulation with a total thickness as thin as 3mm "Thin-layer Heater for Flat Surfaces"