High-resolution X-ray source capable of non-destructive testing for advanced semiconductor packages.
The "G-511 Series" is a micro-focus X-ray source with a sealed design that allows for quick image acquisition and does not require target rotation adjustment. Warm-up takes less than 3 minutes, eliminating long wait times during startup. It features a self-diagnostic function for X-ray tube lifespan, contributing to planned equipment maintenance. 【Features】 ■ Voltage increase to 110kV in under 1 second ■ Maintenance-free target ■ Warm-up in under 3 minutes ■ Self-diagnostic function for X-ray tube lifespan ■ Optional pulse output of less than 1 second *For more details, please refer to the PDF document or feel free to contact us.
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basic information
Main Specifications ■ Operating Voltage Range: 40 - 110 kV ■ Operating Current Range (Target Current): 10 - 100 μA ■ Maximum Output: 10 W ■ Minimum Resolution: 2 μm ■ Minimum FOD: 0.29 mm ■ Target Material: W (Tungsten) ■ X-ray Irradiation Angle: 168 deg. (maximum), 80 deg. (80% or more, equidistant) ■ Control: Continuous, Pulse (Software ≧ 1 s) ■ External Control: RS-232C ■ Input Voltage (DC): 24 (+1.2, -1.2) V * For more details, please refer to the PDF document or feel free to contact us.
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【 Purpose 】 ■ Widely applicable for industrial X-ray non-destructive testing ・ X-ray fluoroscopy ・ X-ray CT imaging ・ Offline analysis * For more details, please refer to the PDF document or feel free to contact us.
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Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.
