From batch processing equipment equipped with unique wafer transfer machines to sheet processing equipment, they are used in fabs around the world for MEMS and semiconductors.
By exciting high-density plasma with 2.45GHz microwaves and suppressing the kinetic energy of ions, it is possible to achieve damage-free process results. It is designed to accommodate a wide range of applications, including ashing in wafer processes, resist stripping, SU-8 resist ashing for MEMS, descum processing, and surface cleaning and activation of substrates.
Inquire About This Product
basic information
PVA Metrology & Plasma Solutions (PVA MPS / Germany) plasma equipment is widely used around the world in many applications such as semiconductors, MEMS, and optical devices, providing maximum process reproducibility and improved yield. The microwave (2.45GHz) plasma equipment achieves a very high electron density and contributes to the suppression of ion kinetic energy, resulting in ideal damage-free process outcomes for various applications.
Price range
Delivery Time
Applications/Examples of results
【Applications】 - MEMS (sacrificial layer, SU-8 resist removal) - Descum processing - WLP (wafer-level package) - Bosch process post-processing 【Track Record】 Used worldwide in a wide range of applications, from research and development in universities and companies to semiconductor factories.
Line up（3）
| Model number | overview |
|---|---|
| GIGA batch 310/360/380M | This is an entry-level batch type model. It is a tabletop model and offers the most cost-effective solution for research and development, prototyping, pilot lines, and small-scale production. |
| GIGA batch 360/380P | Equipped with a chamber and transfer mechanism with automatic opening and closing doors, it allows for the simultaneous extraction of wafers from the cassette and loading them into the chamber. It achieves high throughput through batch processing. |
| GIGA fab M/A (200/300) | Supports single wafer processes and allows for various equipment configurations depending on the type of substrate and whether manual loading or full automation is required. It can also be combined with open cassettes of various wafer sizes, FOUP, and SMIF stations. |
catalog（4）
Download All Catalogs
Company information
Hakuto Co., Ltd. is a trading company specializing in electronics and providing technical services as a technology trading company and a manufacturer of chemical industrial products, creating a rich future where people and technology coexist by identifying individual needs. Our company was established in November 1953 as a trading company engaged in the import and sale of quartz crystals. The name "Hakuto" is derived from the first character of "Brazil," the origin of quartz, and "Tokyo," representing the east. This name embodies our strong desire to grow as an international trading company that connects not only Brazil and Tokyo but also the wider world. 【Manufacturers/Products Listed on Ipros】 Asahi Kasei / Sensors, Hall elements, ICs Crystal IS / UVC (Deep Ultraviolet) LEDs IMPINJ / RAIN RFID devices, systems, software
![[Case Study] Plasma Analysis of "Particle-PLUS" Dual Frequency CCP](https://image.mono.ipros.com/public/product/image/aec/2000679537/IPROS56625809199193232139.jpeg?w=280&h=280)