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  6. PVA Tepla Corporation Microwave Plasma Treatment Device (for Post-Processing)

PVA Tepla Corporation Microwave Plasma Treatment Device (for Post-Processing)

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last updated:Apr 18, 2022

伯東 本社
伯東 本社
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We have a proven track record for customers in OSAT around the world and have established our position with reliable performance.

By generating high-density plasma using microwaves (2.45GHz), highly effective surface treatment becomes possible. Additionally, you can choose from various process forms that cater to your different packaging processes. It is designed for chip packaging, including die attach, wire bonding, flip chip, underfill, and resin sealing, for substrate cleaning and surface activation.

    Ashing device
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PVA Tepla Corporation Microwave Plasma Treatment Device (for Post-Processing)

後工程画像-1.jpg
後工程画像-1.jpg
  • Related Link - https://www.process.hakuto.co.jp/product/679/
  • Special site - Product/service details - https://pr.mono.ipros.com/hakuto/product/

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PVA Metrology & Plasma Solutions (PVA MPS / Germany) plasma devices are widely used around the world in various applications such as semiconductors, MEMS, and optical devices, providing maximum process reproducibility and improved yield. The microwave (2.45GHz) plasma device achieves a very high electron density and contributes to the suppression of ion kinetic energy, resulting in ideal damage-free process outcomes for various applications.

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Applications/Examples of results

【Application】 Surface pretreatment in various processes such as wire bonding, molding, and flip chip underfill. 【Track Record】 We have a strong track record in the back-end process, serving customers worldwide, including OSATs, and have established our position with reliable performance.

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Model number overview
GIGA 690 The GIGA690 has been used by many customers, including OSAT, since its sale in 2008 as a successor to the PS400 and PS660. You can choose a process mode that accommodates various packaging processes of our customers.
GIGA 80Plus The GIGA 80Plus, equipped with an automatic transport mechanism, was developed in response to market demands for semiconductors and features simple operation in both manual and automatic modes. Depending on your production line, you can choose whether or not to include a load chamber and an unload chamber. If there is no load chamber, inline configuration is possible.

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Microwave Plasma Device - Post-Process - PVA Tepla Corporation -

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Microwave Plasma Device - GIGA 690

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Microwave Plasma Device - GIGA 80Plus

Microwave Plasma Device - GIGA 80Plus

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Company information

伯東

伯東 本社

Electronic Components and Semiconductors

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Hakuto Co., Ltd. is a trading company specializing in electronics and providing technical services as a technology trading company and a manufacturer of chemical industrial products, creating a rich future where people and technology coexist by identifying individual needs. Our company was established in November 1953 as a trading company engaged in the import and sale of quartz crystals. The name "Hakuto" is derived from the first character of "Brazil," the origin of quartz, and "Tokyo," representing the east. This name embodies our strong desire to grow as an international trading company that connects not only Brazil and Tokyo but also the wider world. 【Manufacturers/Products Listed on Ipros】 Asahi Kasei / Sensors, Hall elements, ICs Crystal IS / UVC (Deep Ultraviolet) LEDs IMPINJ / RAIN RFID devices, systems, software

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