A dense chromium oxide film is formed on the surface of SUS316L! Excellent corrosion resistance is achieved against HF and HCl.
The "SPP=Super Passivation Process" forms a dense Cr2O3 film without defects on the surface of stainless steel through surface modification. It achieves excellent corrosion resistance against halogen gases such as hydrofluoric acid and hydrochloric acid, and also improves vacuum characteristics. By modifying the surface of stainless steel, various phenomena that differ from conventional understandings of stainless steel have been elucidated. This technology is also expected to be beneficial in the fields of hydrogen infrastructure and ultra-high vacuum. [Purpose] ■ Corrosion prevention ■ Metal contamination prevention ■ Low gas emission *For more details, please refer to the related link page or feel free to contact us.
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【Overview】 ■Film Material: Cr2O3 ■Film Thickness: 40Å ■Heat Resistance Temperature: 300℃ ■Corrosion Resistance: HCl, HBr, HF, F2, etc. ■Effect Example: Reduction of metal contamination *For more details, please refer to the related link page or feel free to contact us.
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【Usage】 ■ Primary side piping ■ Parts such as valves, MFCs, regulators, etc. ■ Chambers and related parts around the chamber *For more details, please refer to the related link page or feel free to contact us.
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We provide various solutions and services related to contamination control in semiconductor manufacturing processes. ◆ Silica coat: The surface of the metal becomes high-purity SiO₂ at the level of synthetic quartz. By being metal-free, it prevents metal contamination. ◆ SPP treatment: A dense Cr₂O₃ film is formed on the surface of SUS316L, providing excellent corrosion resistance against HF and HCl. ◆ SPP-R treatment: A superhydrophobic, oleophobic, and low-friction surface is achieved. Please feel free to contact us if you have any inquiries.