A bonding device for compound semiconductor wafers, etc. It is a dedicated device for wafer waxing that achieves high-quality grinding and polishing.
By optimizing the heating and cooling mechanisms and employing a high-rigidity machine design, we achieve a uniform temperature distribution and stable load distribution, preventing the occurrence of wax thickness variations that can negatively impact precision. 【Features】 ■ Pressure, temperature, and time conditions can be set according to the characteristics of the wafer ■ Damage to the device is minimized ■ Achieves uniform temperature distribution and stable load distribution ■ Prevents the occurrence of wax thickness variations that affect precision ■ Compatible with 12-inch wafers *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Main Specifications】 ■ Wafer Wax Application Section - Compatible plate size for application: φ180 to φ320mm, thickness 5 to 30mm - Heating/cooling temperature setting range: ambient temperature to 160℃ - Setting unit: 1℃ - Temperature distribution accuracy: within ±5℃ - Temperature control accuracy: within ±3℃ ■ Wafer Pressing Section - Setting unit: 1kPa - Maximum pressure: 300kPa *For more details, please refer to the PDF document or feel free to contact us.
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It is possible to set conditions for pressure, temperature, and time according to the characteristics of the wafer, which helps to minimize damage to the device.
Detailed information
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【Features】 ■ Pressure, temperature, and time conditions can be set according to the characteristics of the wafer ■ Reduces damage to the device ■ Achieves uniform temperature distribution and stable load distribution ■ Prevents the occurrence of uneven wax thickness that affects accuracy ■ Compatible with 12-inch wafers
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Company information
Kumasan Medics Co., Ltd. is composed of three divisions: the Semiconductor Technology Division, the MPSD Business Division, and the Sales Division. In our daily actions and activities, each employee stands in the customer's perspective, perceiving potential needs, striving for transformation towards better solutions, and we believe that the products and services that result from this will evolve into something that is beneficial to our customers, and we will continue to take on this challenge.