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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Wafer processing/polishing equipment
  6. 4-inch compatible wafer wax application device 'TEC-1006ZR'

4-inch compatible wafer wax application device 'TEC-1006ZR'

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last updated:Dec 25, 2019

くまさんメディクス MPSD事業部 大津第1工場
くまさんメディクス MPSD事業部 大津第1工場
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Automate the process of attaching multiple wafers to ceramic plates!

The "TEC-1006ZR" is a wafer wax application device compatible with 4-inch wafers. It achieves stabilization of the flatness of wafer attachment. It can accommodate multiple wafers. It can attach a maximum of 10 pieces for 2-inch wafers, 5 pieces for 3-inch wafers, and 3 pieces for 4-inch wafers. 【Features】 - Achieves stabilization of the flatness of wafer attachment (our record: 2.5um) - Capable of handling multiple wafers - Supports a variety of recipes including heating, wax application, pressing, and cooling - Achieves high throughput through optimization of conditions (our record: 2-inch x 8 wafers = within 15 minutes) *For more details, please refer to the PDF document or feel free to contact us.

    Wafer processing/polishing equipmentOther semiconductor manufacturing equipment
2019-12-24_15h11_03.png

4-inch compatible wafer wax application device 'TEC-1006ZR'

2019-12-24_15h11_03.png
2019-12-24_15h11_03.png
  • Related Link - https://ksmedix.com/product/tec1006zr

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basic information

【Specifications】 ■Size (Width × Depth × Height): 940mm × 810mm × 1680mm / 500kg *For more details, please refer to the PDF document or feel free to contact us.

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くまさんメディクス

くまさんメディクス MPSD事業部 大津第1工場

Industrial Machinery

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Kumasan Medics Co., Ltd. is composed of three divisions: the Semiconductor Technology Division, the MPSD Business Division, and the Sales Division. In our daily actions and activities, each employee stands in the customer's perspective, perceiving potential needs, striving for transformation towards better solutions, and we believe that the products and services that result from this will evolve into something that is beneficial to our customers, and we will continue to take on this challenge.

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