Vacuum drying of sputter targets, vacuum components, and fixtures can be utilized!
The "Vacuum Heating Drying Oven" has 30 types of automatic drying process recipes. The operating temperature range is up to 450°C. It can be used for vacuum drying of sputter targets, vacuum parts, and fixtures. Custom orders are also available, so please feel free to contact us when needed. 【Features】 ■ Operating temperature range: up to 450°C ■ Achievable pressure: 10Pa ■ Automatic drying process recipes: 30 types ■ Sample shelves: 2 tiers ■ Custom orders are also available *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications】 ■Effective dimensions: 600W x 500D x 200H ■Sample shelves (1 tier): 2 tiers ■Heating temperature: up to 450℃ ■Vacuum exhaust: DP ■Chamber cooling: water cooling ■Control operation ・Control: PLC ・Operation: Touch panel or PC ■Data logging: External memory or PC *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Vacuum drying of sputter targets ■ Vacuum drying of vacuum components ■ Vacuum drying of jigs and other items *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Japan Create has been challenging cutting-edge technologies to respond to the diversification of the semiconductor industry with high precision, labor-saving, and miniaturization. We seek infinite possibilities in high technology and create reliable know-how that matches user needs with our uniqueness. We will continue to strive towards high-level technology.