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  4. Semiconductor Manufacturing Equipment
  5. Other semiconductor manufacturing equipment
  6. Large-scale autonomous spin coater

Large-scale autonomous spin coater

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Active large-scale machine / autonomous spin coater

last updated:Jul 30, 2021

アクティブ
アクティブ
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Supports large substrates! An active standalone spin coater suitable for research and experiments.

The active spin coater can accommodate large substrates. As the substrate size (cup diameter) increases, the size and weight of the equipment also increase. When placed on a tabletop, the working height can become inconvenient, so it is designed as a freestanding unit. The freestanding type has casters that touch the ground when the adjusters are shortened, making it easy to move. Like the tabletop spin coater with a smaller substrate size (cup diameter), it is equipped with a safety cover with an interlock sensor and an interlock for substrate suction pressure for safety measures. The ACT-700AII (cup diameter 700) can spin coat substrates up to φ500mm (□360mm), but we can also manufacture spin coaters that accommodate larger substrate sizes. For example, we have successfully produced a spin coater with a cup size of φ1800mm to address the challenge of spin coating a □1000mm substrate. Please feel free to consult us. 【Features】 - Widely compatible from research to production - Equipped with 10-step, 100-pattern program memory - Standard emergency stop button - Supports development and evaluation using various solutions *For more details, please download the PDF or contact us.

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act700a2-share.jpg

Large-scale autonomous spin coater

act700a2-share.jpg
act700a2-share.jpg
  • Related Link - https://www.acti-ve.co.jp/spincoater/large/

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basic information

【Excerpt from the specifications of ACT-700AII】 ■ Board size: Φ5 to Φ500mm (Max. Φ20 inches, □360mm) compatible with boards ■ Workpiece weight: Please consult us regarding the weight of the workpiece ■ External dimensions: W848 (including damper and exhaust port 983) × D962 × H door closed 996 (door open 1650) mm ■ Power supply: The power supply and AC servo motor output will be determined separately based on board size and weight ■ Rotation control speed/rotation accuracy: 0 to 3000rpm/±2rpm or less (consultation required depending on load) ◎ A sample stage is a mandatory option. We will propose the most suitable size, shape, material, and application based on the thickness of the board to be spin-coated. ◎ A vacuum pump is a mandatory option. (However, it is not required if the board is fixed without vacuum suction) *For more details, please download the PDF or contact us.

Price range

P6

Delivery Time

Please contact us for details

※Please check periodically for a duration of approximately 3 months.

Applications/Examples of results

【Applications】 Semiconductors, solar cells, mobile devices, optical lenses, eyeglass lenses, nanotechnology and biotechnology, housing equipment, cutting-edge medical-related applications, displays such as liquid crystal, experiments/research/production for obtaining coatings and thin films. *For more details, please download the PDF or contact us.*

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Model number overview
ACT-600A II Φ5~Φ400 (Max.Φ16 inches, □300 mm) Compatible with substrates
ACT-700A II Φ5~Φ500 (Max.Φ20 inches, □360 mm) Compatible with substrates

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アクティブ

アクティブ

Electronic Components and Semiconductors

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ACTIVE specializes in designing, manufacturing, and selling products tailored to customer needs, with spin coater products as our main focus. ACTIVE's spin coaters can be selected in various sizes to meet specific challenges and can be customized in many ways. Customers may face various issues, such as a lack of space for equipment installation or limited budgets. In such cases, ACTIVE's compact and tabletop spin coaters can be of great assistance. Even in a compact or tabletop size, it is possible to set up a variety of testing configurations with 10 steps and 100 patterns (with prior notice, 20 steps and 50 patterns, or 50 steps and 20 patterns are also possible). By fine-tuning the settings, you can create the desired operating environment. The operation screen of the spin coater displays real-time rotation speed and vacuum pressure, making it easy to understand the situation. Additionally, using a sample stage that suits your application can improve efficiency and make it easier to achieve the desired coating film, so we also propose sample stages tailored to each customer. Please let us know your challenges and requests first. Based on the hearing, we will propose a spin coater that fits your needs.

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