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  1. Home
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  4. Semiconductor Manufacturing Equipment
  5. Evaporation Equipment
  6. Case Study: Valves usable in high-temperature ALD processes *Currently available for free.

Case Study: Valves usable in high-temperature ALD processes *Currently available for free.

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last updated:Mar 29, 2023

KITZ SCT Corporation Tokyo Headoffice
KITZ SCT Corporation Tokyo Headoffice
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"Complete Case Collection of Flow Paths" - Presenting examples of diaphragm valves made with PFA resin sheets that can be used in high-temperature environments up to 200°C for the entire valve.

Do you have any concerns such as wanting to heat the entire valve, needing a valve that can be placed in a constant temperature bath with the handle attached, or wanting a valve that ensures stable and reproducible gas flow? At KITZ SCT, we offer various solutions for fluid-related issues in semiconductor manufacturing. If you have any specific cases you are interested in, please contact us via Ipros or through our website. Website: https://www.kitzsct.com/contact/product/?utm_source=Ipros&utm_medium=web&utm_campaign=Arbooth

    valveEvaporation EquipmentOther semiconductor manufacturing equipment
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Case Study: Valves usable in high-temperature ALD processes *Currently available for free.

2021012.png
2021012.png
  • Special site - Product/service details - https://pr.mono.ipros.com/kitz-sct/product/

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basic information

- This is a valve with excellent heat resistance, corrosion resistance, and durability. - Due to the low variation in Cv value during use, stable and reproducible gas flow can be achieved, allowing for the use of materials with low vapor pressure. - The heat-resistant valve handle allows the use of a constant temperature bath while the handle is attached.

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It varies depending on the product specifications. For more details, please contact us through our website.

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※It varies depending on the specifications, so please feel free to consult us.

Applications/Examples of results

Applications - For those who need valves that can be used in high-temperature environments - For those who need highly durable valves - Processes that use constant temperature baths - Processes that handle materials with low vapor pressure

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Valves suitable for high temperature and ALD processes

Valves suitable for high temperature and ALD processes

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KITZ

KITZ SCT Corporation Tokyo Headoffice

Electronic Components and Semiconductors

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KITZ SCT combines a wide range of technologies, including metal processing and welding techniques, a spacious and clean environment, ultra-precision cleaning systems, and uniquely developed ultra-precision polishing technology, to develop, manufacture, and provide sales services for various piping components used in semiconductor manufacturing, from vacuum to high-pressure systems. Additionally, we incorporate strict quality control systems, including ISO standards and high-pressure gas certification, aiming for comprehensive cleanliness through all analyses and evaluations from material analysis to process/final products, always responding to the needs of the times.

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  • Manufacturing and processing machinery
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