In-plane temperature distribution measurement tool for semiconductor manufacturing equipment 'T/C Wafer'

Real-time transmission of temperature changes and temperature distribution to the logger! You can accurately grasp temperature characteristics.

The "T/C Wafer" is a tool for measuring in-plane temperature distribution that can measure the actual temperature of the wafer in real time for semiconductor manufacturing equipment. By understanding the actual temperature distribution characteristics affecting the wafer, it contributes to the simplification of process temperature settings and controls, as well as improving the uniformity of film thickness distribution, not just relying on the set temperature on the equipment side. Thanks to its unique embedded technology, it also reduces solid differences in the temperature contact point positions, resulting in high reliability of the measured temperature. 【Features】 ■ Real-time measurement of the actual temperature of the wafer ■ High reliability of the measured temperature ■ Contributes to the simplification of process temperature settings and controls, and improves the uniformity of film thickness distribution ■ Reduces solid differences in temperature contact point positions through unique embedded technology ■ Achieves high reliability of the measured temperature *For more details, please refer to the PDF document or feel free to contact us.

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