Improvement of Insulation Properties: Alumina Thermal Spraying on Semiconductor Manufacturing Equipment Parts
【Effect】Improved insulation and plasma resistance through alumina thermal spraying technology 【Challenge】 In semiconductor manufacturing equipment components, alumina thermal spraying technology has been used as a solution to prevent electrostatic damage; however, the challenges have been the need for high-purity coatings and quick delivery times. 【Solution】 Our alumina thermal spraying generates high-purity coatings and accommodates short delivery times. 【Our Strength】 Our plasma spraying equipment specializes in handling single items and prototypes. *There are also materials not available online. For more details, please download the PDF or feel free to contact us. *Case study materials can be downloaded from the catalog of I.C.S. case studies.
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Alumina (Al2O3 99.9%) thermal spraying for semiconductor manufacturing equipment parts Purpose: Improvement of insulation and plasma resistance Film type: Alumina thermal spray Al2O3 (99.9%) Film thickness: 50~500μm Compatible substrates: Al, quartz, SUS, etc.
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Improvement of insulation and plasma resistance through alumina (Al2O3 99.9%) thermal spraying on semiconductor manufacturing equipment parts.
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Company information
I.C.S. provides optimal functionality for metal components in various fields such as automotive, aerospace, electrical equipment, infrastructure, and medical as a "comprehensive heat treatment manufacturer." We work together with our customers from development to mass production through meetings, collection, cleaning, processing, inspection, and delivery, assisting in achieving results. ■ We have over 700 business partners annually! > We can accommodate short delivery times! > Prototyping is possible from just one piece! > We can also handle mass production of large lots! Additionally, we have obtained various certifications, including JISQ9100 (Aerospace Quality Management System) and ISO14001 (Environmental Management System), ensuring strict quality control and environmentally friendly business practices for the safe and secure supply of products. The technological strength of I.C.S. is born from trust. Since our founding nearly 50 years ago, we have developed alongside our customers. Please feel free to consult us about any characteristics or functions that may not meet your current needs. We also offer online consultations. Our company has gained trust not only from the six prefectures of Kanto but also from partners in Tohoku, Chubu, and Kinki regions across the country.