In addition to small models, we also offer medium and large sizes! They have significant advantages in both performance and energy efficiency.
The POWER Eco series product is a high-performance energy-saving cryopump developed with the aim of reducing power consumption and cooling water usage from an energy-saving perspective. Due to the increased efficiency of refrigeration units and multi-wave control, the number of cryopumps that can be operated with a single compressor has increased, significantly reducing power consumption and cooling water usage per unit. 【Features】 ■ Effective for energy and resource savings [Power consumption, cooling water usage: Reduction of 15-70% possible] ■ Shortened regeneration and startup time [Less than half compared to conventional models (compared to our company)] ■ Improved exhaust performance [Substantially increased effective argon exhaust capacity by 1.5 to 4 times (compared to our company)] ■ Low vibration [Approximately 1/10 or less compared to conventional models] *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Lineup (Partial)】 <Small> ■P-085C ■P-086C <Medium/Large> ■P-128C ■P-128CL ■P-160C *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Semiconductor manufacturing equipment (sputtering equipment, ion implantation equipment) ■ Electronic component manufacturing equipment ■ Vacuum deposition equipment ■ Vacuum furnaces, space chambers ■ Accelerators ■ Various high vacuum equipment *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.