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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Evaporation Equipment
  6. Film formation processing on three-dimensional shapes

Film formation processing on three-dimensional shapes

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last updated:Aug 29, 2022

東邦化研
東邦化研
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Not only can we create films on flat surfaces, but we can also apply films to three-dimensional objects! Please let us know the areas where you would like the film to be applied.

Toho Kaken Co., Ltd. offers contract processing (coating services) for functional thin films using ion plating, vacuum deposition, sputtering, and plasma CVD. We have established a system to meet a wide range of requests, from small-scale projects for prototypes, development, and research to medium-sized production projects, accommodating various types of films such as metal films, reactive films like oxide, carbide, and nitride films, alloy films, and their laminated films. For example, we can perform film deposition not only on flat shapes like glass plates and films but also on three-dimensional products such as ceramic processed items and metal materials! By rotating the items within the equipment during the film deposition process, we can apply the film to specified areas. Additionally, through clever holding methods, it may also be possible to deposit films on stepped areas, grooves, and the interiors of holes. We can flexibly accommodate sizes and shapes, from small items with a diameter of less than 1 mm to three-dimensional objects measuring φ500 mm × L500 mm and flat plates measuring 800 mm × 1000 mm. Even if holding (fixing) seems difficult, we have over 35 years of rich experience and know-how, so please feel free to consult with us first!

    SensorsEvaporation EquipmentContract manufacturing
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Film formation processing on three-dimensional shapes

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■Supported Film Types Metal Films: Al, Au, Ag, Cu, Ni, Cr, Mg, B, Ti, Zr, Nb, Mo, Pd, In, Si, Ta, W, Sn, Pt, etc. Stacked Films: Au/Ni/Cr, Au/Pt/Ti, Au/Pd/Ti, Au/Cr, Cu/Cr, etc. Oxide Films: Al2O3, SiO2, TiO2, Cr2O3, ITO, MgO, NbO, Ta2O5, WO3, ZrO2, ZnO, etc. Nitride Films: AlN, BN, CrN, MoN, NbN, SiN, TaN, TiN, etc. Carbide Films: SiC, TiC, BC, etc. *Please consult us as it may vary depending on the equipment used. ■Maximum Usable Size: 800×1000mm *We have a wide range of equipment from small to large. ■Supported Substrates - Si Wafer - Glass - Film - Ceramics - Metal Materials - Others

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Very easy to understand 'Thin Film Q&A'

Very easy to understand 'Thin Film Q&A'

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Technical Documentation on Surface Treatment Thin Film Coating

Technical Documentation on Surface Treatment Thin Film Coating

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Toho Kaken Co., Ltd. Catalog with Processing Results

Toho Kaken Co., Ltd. Catalog with Processing Results

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Ion plating method

Ion plating method

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Sputtering method

Sputtering method

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Plasma CVD method

Plasma CVD method

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Company information

東邦化研

東邦化研

Electronic Components and Semiconductors

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Our company offers contract processing (coating services) for functional thin films using ion plating, vacuum deposition, sputtering, and plasma CVD. Since our inception, we have focused on "functional thin films" such as conductivity, insulation, and corrosion resistance. We accommodate various types of films, including metal films, reactive films like oxide, carbide, and nitride films, as well as their laminated films. We have established a system to respond to a wide range of requests, from small-scale prototypes, development, and research to medium-sized production runs. Currently, we have 11 deposition devices in operation, ranging from small machines with a diameter of 300mm to inline mass production machines with a film formation area of 1000mm x 900mm. All processes, from the unboxing of substrates entrusted by customers to the packaging of the coated products, are conducted within a clean room. If you are considering functional thin films, please feel free to contact us! Based on our flexible response and over 35 years of experience, we will meet your needs! *Information about our exhibition participation is also available on our website. Please take a look.

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