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  6. High Heat Resistance + High Transparency PEEK Film for Semiconductor Manufacturing Processes "EXPEEK"

High Heat Resistance + High Transparency PEEK Film for Semiconductor Manufacturing Processes "EXPEEK"

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last updated:May 19, 2022

クラボウ(倉敷紡績株式会社)
クラボウ(倉敷紡績株式会社)
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A special heat-resistant film that combines "heat resistance" and "transparency," with low thermal shrinkage even above 200℃ and the ability to transmit light with wavelengths over 370nm!

In semiconductor manufacturing processes, heat-resistant tape for wafer protection is used, primarily made from polyester-based films such as PET. Recently, there has been an increasing demand for tapes with higher heat resistance (over 200°C) for the development of new semiconductor products and the optimization of manufacturing processes. However, polyester-based materials lack sufficient heat resistance, and polyimide films, which are heat-resistant, face challenges with transparency. Kurabo has developed a PEEK film called "EXPEEK" that combines heat resistance and transparency, suitable for high-temperature processes exceeding 200°C in semiconductor manufacturing. This film is attracting attention from semiconductor manufacturers and tape manufacturers as it contributes to increased design flexibility in manufacturing processes. **Features** - The film exhibits very little dimensional change even in high-temperature environments. - High heat resistance: Low thermal shrinkage at over 200°C, melting point 343°C, Tg (TMA) 320°C. - High transparency: 83% total light transmittance, UV transmission starts from 370nm. - Low water absorption: 0.07%. *For more details, please refer to the PDF document or feel free to contact us.*

    Other polymer materials
エクスピーク_サムネイル画像.jpg

High Heat Resistance + High Transparency PEEK Film for Semiconductor Manufacturing Processes "EXPEEK"

エクスピーク_サムネイル画像.jpg
エクスピーク_サムネイル画像.jpg

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basic information

【Other Features and Specifications】 ■ Achieves 4% haze and high transparency ■ Excellent surface smoothness ■ Low dielectric properties: relative permittivity 3.07 (10GHz), dielectric loss tangent 0.003 (10GHz) ■ Thickness: 12μm, 25μm, 50μm ■ Width: Max 1,600mm *For more details, please refer to the PDF document or feel free to contact us.

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Applications/Examples of results

【Applications】 ■ Heat-resistant and chemical-resistant labels ■ Wafer protection tape substrate for semiconductor processes ■ Glass alternative transparent substrate *For more details, please refer to the PDF document or feel free to contact us.

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Two-axis extended PEEK "EXPEEK" property table

Two-axis extended PEEK "EXPEEK" property table

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Two-Axis Extended PEEK 'EXPEEK' Feature Document (with Transparency Comparison Images)

Two-Axis Extended PEEK 'EXPEEK' Feature Document (with Transparency Comparison Images)

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Expeak

From December 14 (Wednesday) to 16 (Friday), 2022, we will be exhibiting high-performance films, chemical concentration meters, resin processed products, and chemical filters at SEMICON JAPAN!

  • Seminar・Event

Kurabo will exhibit at "SEMICON JAPAN" held at Tokyo Big Sight. <Exhibited Products> - High-Performance Films For semiconductor process tapes, we will present a new product for back grinding tapes in addition to the stretchable and flexible dicing tape films that we exhibited last year. We will also showcase the special heat-resistant film "Expeak," which combines heat resistance and transparency, and the low dielectric film "Oidis" for high-speed communication. - Liquid Concentration Meters We will introduce three models of liquid component concentration meters, starting with the highly accurate "ChemicAlyzer Ace-3." As a reference exhibit, we will also showcase an In-Situ liquid component monitor that measures liquid components in real-time without contact and an In-Situ compact thermal camera. - Resin Processed Products In the field of resin processed products, we will introduce the comprehensive capabilities of our Kumamoto facility. We will present our resin processing technologies such as cutting and melting molding, parts cleaning technology for washing processes, and overall support for measurement and evaluation. - Chemical Filters From the Kurabo Group's Kurashiki Textile Processing, we will exhibit the chemical filter "Klangraft," which can remove trace metal ions.

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Company information

クラボウ(倉敷紡績株式会社)

クラボウ(倉敷紡績株式会社)

Electronic Components and Semiconductors

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Since its founding in 1888, the Kurabo Group has always looked one step ahead, continuously taking on new challenges to create new value. Today, we have expanded our business areas into a wide range of fields that support daily life, including textiles, automobiles, housing, and food, as well as industries supported by electronics, semiconductors, environmental plants, biomedical, and machine tools. We aim to provide products and services that enrich people and society, and we are committed to realizing this goal. Our driving force is the desire to "create new value that surprises the world and contributes to society." Based on this, we strive to enhance and integrate the core technologies that the Kurabo Group has accumulated in various business fields, working towards innovation and the creation of new specialty businesses. As a company that connects people and society to the next generation, we will continue to grow and develop. ■ Business Areas - Textile Business - Chemical Products Business - Environmental Mechatronics Business (Electronics field, Engineering field, Biomedical field, Machine Tool field) - Food and Service Business - Real Estate Business

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