Crystal orientation and polarity are clear in 15 minutes! Stable surface analysis is possible without the influence of charging!
The "TOFLAS-3000" is an atomic scattering surface analysis device that can simultaneously perform crystal structure and elemental analysis of solid surfaces such as metals, semiconductors, and insulators. This device has developed the coaxial direct collision ion scattering spectroscopy (CAICISS) method and uses an atom beam of electrically neutral He (Ne, Ar) as a probing tool, allowing for stable surface analysis without the influence of charging, even on insulators. In crystal surface structure analysis, a unique pattern specific to the crystal surface can be obtained by conducting a full-angle scan of the incident angle, making it visually easy to determine the surface structure. 【Features】 ■ Visualization of crystal orientation, symmetry, and the front and back of polar crystals * Easy distinction of the front and back of crystals with wurtzite structures (such as GaN and AlN) ■ Simple elemental analysis and crystal structure analysis for each layer near the surface * Analysis of ultra-thin films is also possible ■ When synchronized with pole figure simulation, it can be operated as if "seen in person" ■ No issues with orientation determination of insulating samples or organic molecular films ■ High-sensitivity evaluation of impurities through simultaneous measurement with SIMS (complementary to TOF spectra) * For more details, please refer to the PDF document or feel free to contact us. * We also accept analysis requests.
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【Types of Analysis】 ■ Elemental Analysis ■ Growth Orientation Determination ■ Ultra-Thin Film Evaluation ■ Polarity Determination ■ Crystal Structure Evaluation *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
[Examples of Surface Structure Evaluation] ■Identification of the crystal structure of GaN and AlN thin films (distinguishing the front and back of wurtzite structure, etc.) ■Evaluation of the surface structure of SCAM (ScAlMgO4)(001) using a pole figure ■Relationship between the visibility of each element in LSAT (100) and the incident orientation ■Surface atomic arrangement of crystals with a "spiral structure" (SiO2) *For more details, please refer to the PDF document or feel free to contact us.
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At Pascal Corporation, we handle a variety of experimental equipment useful for research and development, including vacuum devices such as PLD/laser MBE systems, surface analysis equipment like atomic scattering spectrometers, cryogenic refrigeration systems, and Agilent (Varian) vacuum pumps. With a global perspective in vacuum equipment and scientific instruments, we constantly look ahead of the times, anticipate new technologies and product needs, and continue to provide products that are beneficial to our users.