Wide-area image map driven by stage! Introducing a measurement example that visualizes the distribution of magic.
We will introduce a case of TOF-SIMS that enables wide-area image map measurement by combining it with an electric stage. We conducted wide-area (30mm × 30mm) image mapping measurements by drawing with two types of black markers on a metal plate. It is difficult to distinguish between the two types of markers in optical images, but by confirming the image map with characteristic secondary ion peaks for each marker, we can visualize the distribution of the markers. Additionally, there are cases where detailed analysis results were obtained from spectra after wide-area image map measurements using TOF-SIMS. [Overview] ■ Standard measurements (beam scan measurements) target sizes of 500μm × 500μm or smaller. ■ By combining with an electric stage, wide-area image map measurements are possible. *For more details, please refer to the PDF document or feel free to contact us.
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Aites was established in 1993, originating from the quality assurance department of the IBM Japan Yasu office. Based on the technical expertise cultivated through cutting-edge defect analysis and reliability assurance of electronic components at the IBM Japan Yasu office, we have provided various products and services that support the development and manufacturing of semiconductors, displays, organic EL, solar cells, and electronic components to customers both domestically and internationally.
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