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  6. Non-contact transport device for heavy objects "Float Chuck SA-5C (SAN) type"

Non-contact transport device for heavy objects "Float Chuck SA-5C (SAN) type"

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Float Chuck SA-5C (SAN) type

last updated:Jul 25, 2022

ソーラーリサーチ研究所 大阪事業所
ソーラーリサーチ研究所 大阪事業所
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Bernoulli chuck capable of efficient non-contact transport even for heavy workloads.

The heavy object non-contact transport device (Float Chuck SA-5C(SAN) type) adopts a new gas vertical jet method. The gas vertical jet method allows the gas flow ejected from the nozzle to create a vertical gas jet in the cushion chamber, reducing friction loss of the gas flow within the cushion chamber, enhancing the effect of negative pressure generation, and significantly increasing the suspension capacity compared to conventional types. This results in improved holding stability, greater resistance to impact, and nearly halved gas consumption. New method: Explanation of the gas vertical jet method. The heavy object non-contact transport device (Float Chuck SA-5C(SAN) type) technology allows for the suspension and transport of substrates in a non-contact state by ejecting air towards the substrate, keeping it floating in the air. It is designed to handle high loads while achieving low air consumption.

    WaferPress Dies
3meihand1.jpg

Non-contact transport device for heavy objects "Float Chuck SA-5C (SAN) type"

3meihand1.jpg
3meihand1.jpg
  • Related Link - http://www.solarlab.co.jp/dg

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basic information

The heavy object non-contact transport device "Float Chuck SA-5C (SAN) type" utilizes a vertical gas jet method, which allows the gas flow ejected from the nozzle in the cushion chamber to create a vertical gas jet. This reduces the friction loss of the gas flow within the cushion chamber, enhances the effect of negative pressure generation, and significantly increases the suspension capacity compared to conventional types. As a result, the holding stability force is improved, it is more resistant to shocks, and the gas consumption is nearly halved.

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Applications/Examples of results

8G, 10G LCD glass Acrylic thick plates for aquariums Large steel plates Large resin thick plates Large metal plates

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ソーラーリサーチ研究所

ソーラーリサーチ研究所 大阪事業所

Electronic Components and Semiconductors

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Manufacturing of non-contact transport devices and application devices for wafers, liquid crystal glass substrates, PDPs, ceramics, printed circuit boards, FPC substrates, films, paper, cloth, etc., using our patented non-contact transport device "Float Chuck" based on the vertical gas jet method developed by our company.

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