Alignment stage suitable for semiconductor manufacturing and inspection equipment.

You can choose from the 'RST Aligner' that achieves a tracking capability of 0.1μm and the space-saving, thin, and compact 'YRA Series' according to your application needs.

【RST Aligner】 - The most notable feature is the balanced triangular arrangement of the drive units, enabling ultra-high precision micro-movement essential for alignment. - Achieves high responsiveness of 0.1μm ± 20nm without feedback from linear scales, etc. - Allows for large-diameter through holes since it does not use bearings. - Table size can be freely adjusted to match wafer size or workpiece size. - Z mechanism can be added as required for applications such as bonding. - Customizable for high load capacity specifications, color changes, and other specifications. 【YRA Series】 - Achieves high precision and high rigidity while being compact and space-saving. - Integrated structure where each axis of the XYθ axes operates independently. - Four models are available to suit various applications: - YRA-070: The smallest alignment stage in the series. - YRA-071: Capable of accommodating various motor modification requests. - YRA-131: Suitable for bonding small to medium-sized LCDs and wafers. - YRA-200: The largest model in the series with high load capacity specifications.

Semiconductor inspection/test equipmentOther semiconductor manufacturing equipmentOther image-related equipment