High coating adhesion and low dust generation through low-temperature treatment! A lineup of products with different surface resistivity values.
The ESD-specific DLC coating "THOR Slick" is a product that can be used to address issues such as decreased productivity caused by dust and other particles attracted by static electricity. It features high film adhesion and low dust generation through low-temperature processing. The color is black, and it possesses wear resistance, corrosion resistance, and seizure resistance. It can be used in a wide range of applications, including wafer holders, wafer transport arms, and suction stages in the semiconductor manufacturing front-end process. 【Features】 ■ High film adhesion and low dust generation through low-temperature processing ■ Gentle ESD discharge curve ■ A lineup of products with different surface resistivity values ■ Possesses wear resistance, seizure resistance, and corrosion resistance *For more details, please refer to the PDF document or feel free to contact us.
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【Film Characteristics (Excerpt)】 ■Color: Black ■Hardness: 1000–2200 Hv ■Processing Temperature: <150 ℃ ■Friction Coefficient: 0.10–0.20 ■Film Thickness: 1.0–2.0 μm *For more details, please refer to the PDF document or feel free to contact us.
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【Applications】 ■ Semiconductor manufacturing front-end processes: wafer holders, wafer transport arms, suction stages, etc. ■ Semiconductor manufacturing back-end processes: parts feeders, guides, probe pins, inspection equipment, tables, etc. ■ ESD countermeasures for other precision component manufacturing equipment parts. *For more details, please refer to the PDF materials or feel free to contact us.
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In all industrial sectors, the demand for surface modification technologies that can address cost reduction, resource conservation, diversification of applications, and even environmental pollution prevention is increasing. Japan Coating Center Co., Ltd. (JCC) has been providing various surface modification treatment technologies to meet the diverse needs of our customers, with the motto of "Providing technology that satisfies our customers." We were among the first to obtain ISO 9001 certification in terms of quality and functionality. We are actively engaged in the pursuit of excellent quality systems and new technologies.