We will accept samples at our lab and provide contract analysis services for residual gases in devices.
Analysis Application Examples (Accumulation Method) Destructive Analysis - Measurement of residual and emitted gases between each layer of semiconductor chips - Measurement of gas emissions from semiconductor wafer substrates - Measurement of residual gases within MEMS device chips Non-Destructive Analysis - Leak testing and gas emission measurement of sealed devices
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Recommended for such evaluations! - Process evaluation - Quality control and quality analysis of devices - Evaluation and condition setting before the introduction of analytical equipment Please make use of our contract analysis services.
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Applications/Examples of results
Destructive Analysis ● Measurement of residual and emitted gases between each layer of semiconductor chips ● Measurement of gas emissions from semiconductor wafer substrates ● Measurement of residual gases within MEMS device chips Non-Destructive Analysis ● Leak testing and gas emission measurement of sealed devices
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At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.
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