Optimized cooling concept! Inverted magnetic array is also available.
The "Magnet Bar" is a component for rotary magnetrons that has excellent magnetic field uniformity. The development focuses on target erosion, layer uniformity, process stability, and the strength of the magnetic field according to the application. It also accommodates various end blocks. This product is available in a wide range of magnetic field strengths and lengths. Additionally, inspections are conducted in-house for quality control. 【Features】 ■ Optimization of film uniformity ■ High target utilization efficiency ■ Uniform thin film characteristics across the entire substrate width ■ Reduction of process voltage ■ Maximum process power (limited by target material and bonding) *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Merits (Excerpt)】 ■ Excellent magnetic field uniformity ■ Optimal return design for the race track and various types of end caps ■ Sputtering angles of ±15° to ±60° ■ Inverted magnetic arrangement (invert) also available ■ Optimized cooling concept *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
[Examples of Achievements] ■ Delivered over 2,000 magnetic bars *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Our company is located in Tokyo, where we support VON ARDENNE's sales activities and strategic business development. Additionally, our service engineers support the equipment of Japanese customers. We have installed building material glass coating systems, roll-to-roll web coaters, solar cell sputtering systems, and electron beam systems. Please feel free to contact us if you have any inquiries.
