Excellent mechanical durability! Versatile metal plate-type high-temperature heater.
The "Plate Heater" is a product that embeds a sheath heater made by Thermocoax into a metal heating plate, allowing for heating up to a maximum of 800°C. Since heating occurs on plates made of stainless steel, Inconel, aluminum, etc., it is suitable for applications that require durability, such as applying pressure during heating, compared to heaters using quartz glass or carbon. Additionally, the electrode part that connects the heater wire embedded inside the heating plate to the power supply is available in variations suited to your usage environment, including models with insulated sleeve terminals for use in the atmosphere and CP terminal models for vacuum chambers. 【Features】 ■ Excellent mechanical durability ■ Flexible design compatibility *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Specifications】 ■ Maximum operating temperature: 700℃ in vacuum / 800℃ in other environments ■ Effective heating area: Φ50 to Φ220mm (please consult us for sizes larger than this) *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Integration into thin film devices (CVD/Sputtering) ■ Integration into semiconductor manufacturing equipment (substrate heating/flash annealing, etc.) ■ Usable for various other purposes *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Our company specializes in the manufacturing of heaters used in ultra-high temperature ranges exceeding 800°C to 2,500°C. We are utilized in various fields, from research and development of new materials, manufacturing of lenses and semiconductors, to extreme environments such as nuclear and aerospace sectors. Moving forward, we will continue to leverage our expertise to propose products that meet our customers' needs.