Compatible with SI 500-1M, SI 500 PPD-1M, etc.! The transport chamber is available in three types.
The "3ICP + 2 cassette module" is a cluster tool capable of accommodating various modules. It can be equipped with the ICPRIE module "SI 500-1M," the RIE module "SI 500 RIE-1M," the PECVD module "SI 500 PPD-1M," and the ALD module "SI ALD-1M," among others. Please feel free to consult us when you need assistance. 【Compatible Modules】 ■ SI 500-1M: ICPRIE Module ■ SI 500 D-1M: ICPECVD Module ■ SI 500 RIE-1M: RIE Module ■ SI 500 PPD-1M: PECVD Module ■ SI ALD-1M: ALD Module *For more details, please refer to the PDF document or feel free to contact us.
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【Transport Chamber】 ■3 Ports ■4 Ports ■6 Ports *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Our company website features information on used equipment related to FPD and semiconductors. ● Main Business Activities Purchase of used semiconductor manufacturing equipment, refurbishment, sales, and setup operations Construction and consulting for semiconductor manufacturing lines Purchase of used FPD manufacturing equipment, refurbishment, sales, and setup operations Construction and consulting for FPD manufacturing lines Contract development, manufacturing, and sales of semiconductor manufacturing equipment and FPD manufacturing equipment Sales of various equipment parts Agency sales of overseas manufactured equipment