[For the semiconductor industry] Replacement of rubber O-rings with spring-loaded C-rings HNRV

No need to change the size or number of existing bolts? A must-see for those struggling with "wanting to eliminate gas permeation and gas release from vacuum rubber O-rings" in semiconductor manufacturing equipment!

Our "Delta Beta HNRV" is a combination of a delta seal designed with a low tightening pressure (Y) and a specially processed internal spring, achieving replacement of rubber O-rings, performance enhancement, and PFAS-free status. For those who have concerns such as: "I want to eliminate gas permeation and gas release from rubber O-rings." "I cannot change the number or size of bolts on existing flanges." "I am troubled by PFAS in rubber O-rings." This metal seal is recommended. 【Features】 ■ Mainly for ultra-high vacuum applications ■ Even lower design tightening pressure than before ■ Can be replaced with elastomer O-rings ■ Two delta-shaped protrusions on the contact side of the cross-section ■ PFAS-free This does not guarantee compatibility with existing flanges. Specifications for existing flanges are required. For more details, please download the PDF or feel free to contact us.

SealingCVD EquipmentElectron beam lithography equipment