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  6. [For the semiconductor industry] Replacement of rubber O-rings with spring-loaded C-rings HNRV

[For the semiconductor industry] Replacement of rubber O-rings with spring-loaded C-rings HNRV

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last updated:Apr 23, 2026

Technetics Group Japan
Technetics Group Japan
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No need to change the size or number of existing bolts? A must-see for those struggling with "wanting to eliminate gas permeation and gas release from vacuum rubber O-rings" in semiconductor manufacturing equipment!

Our "Delta Beta HNRV" is a combination of a delta seal designed with a low tightening pressure (Y) and a specially processed internal spring, achieving replacement of rubber O-rings, performance enhancement, and PFAS-free status. For those who have concerns such as: "I want to eliminate gas permeation and gas release from rubber O-rings." "I cannot change the number or size of bolts on existing flanges." "I am troubled by PFAS in rubber O-rings." This metal seal is recommended. 【Features】 ■ Mainly for ultra-high vacuum applications ■ Even lower design tightening pressure than before ■ Can be replaced with elastomer O-rings ■ Two delta-shaped protrusions on the contact side of the cross-section ■ PFAS-free This does not guarantee compatibility with existing flanges. Specifications for existing flanges are required. For more details, please download the PDF or feel free to contact us.

    SealingCVD EquipmentElectron beam lithography equipment
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[For the semiconductor industry] Replacement of rubber O-rings with spring-loaded C-rings HNRV

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  • Related Link - https://technetics.com/technetics-products/
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Delta Beta HNRV

Delta Beta HNRV

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Semiconductor Summary Document (English Version)

Semiconductor Summary Document (English Version)

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If you want to eliminate gas permeation and gas release with a vacuum rubber O-ring, replace it with a spring-energized C-ring! 'Delta Beta HNRV'

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The Delta Beta HNRV is originally designed with a low tightening pressure (Y) HELICOFLEX Delta seal combined with a specially processed internal spring, achieving replacement of rubber O-rings and improved performance. This metal seal is recommended for those who have concerns such as "wanting to eliminate gas permeation and gas release from rubber O-rings" and "unable to change the number or size of bolts on existing flanges." 【Features】 ■ Mainly for ultra-high vacuum use ■ Even lower design tightening pressure than before ■ Can be exchanged with elastomer O-rings ■ Two delta-shaped protrusions on the contact side of the cross-section It does not guarantee compatibility with existing flanges. Specifications for existing flanges are required. *For more details, please download the PDF or feel free to contact us.

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Technetics

Technetics Group Japan

Machine elements and parts

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Technetics Group Japan, Inc. is the Japanese subsidiary's sales and a part of engineering department of a high-performance seal manufacturer that provides seal products (such as spring-energized C-rings, metal seals like HELICOFLEX(R) seals, and elastomeric expansion seals) customized to customer applications with flexible design support. Capital: 84.06 million yen. We deliver metal seals, inflatable seals, and flexible graphite seals that demonstrate high performance in demanding sealing environments across various fields such as UHV, semiconductors, nuclear power, fusion energy, Oil&Gass, specialized engines, valves and compressors, pharmaceutical life Sciences equipment, and aerospace, cryogenic to high temperatures and UHV to high pressure.

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