Supports a maximum substrate size of 156mm x 156mm! Compatible with vacuum or atmospheric transport systems and can be equipped with a load lock.
The "AS-Premium" is an RTP device that supports processes under atmospheric and vacuum conditions. It features a rapid cooling mechanism after annealing (only for upper lamp heating) and is equipped with low temperature (1100°C) and high temperature (1300°C) pyrometers. Please feel free to consult us when you need assistance. 【Features】 ■ Supports substrates up to 156mm x 156mm ■ Low temperature (1100°C) / high temperature (1300°C) pyrometers ■ Rapid cooling mechanism after annealing (only for upper lamp heating) ■ Compatible with atmospheric and vacuum processes ■ Turbo pump can be installed *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 ■ Mass Flow Controller: Up to 8 ■ Capable of mounting vacuum or atmospheric transport devices and load locks ■ Maximum Temperature ・1100℃ (Lamp heating type on top of the substrate, 4 zones) ・1300℃ (Lamp heating type on top of the substrate, 8 zones) ・1300℃ (Lamp heating method on both top and bottom of the substrate, 6 zones) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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