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  1. Home
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  3. Scientific and Physics Equipment
  4. Surface Treatment Equipment
  5. Plasma surface treatment equipment
  6. Microwave Plasma Source "MIRENIQUE Series"

Microwave Plasma Source "MIRENIQUE Series"

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last updated:Jun 21, 2023

ハイテック・システムズ
ハイテック・システムズ
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Ideal for R&D equipment using MWPECVD! MW-SURFATRONS are compatible with atmospheric pressure or reduced pressure.

The "MIRENIQUE series" is a microwave plasma source. It is suitable for PECVD, diamond, DLC, CNT, and plasma-assisted polymerization, with reactors and plasma sources ideal for MWPECVD R&D equipment. MW-SURFATRONS can operate at atmospheric pressure or reduced pressure. 【Features】 ■ Suitable for PECVD, diamond, DLC, CNT, and plasma-assisted polymerization ■ Reactors and plasma sources suitable for MWPECVD R&D equipment ■ MW-SURFATRONS can operate at atmospheric pressure or reduced pressure *For more details, please refer to the PDF materials or feel free to contact us.

    Plasma surface treatment equipment
マイクロ波プラズマソース.PNG

Microwave Plasma Source "MIRENIQUE Series"

マイクロ波プラズマソース.PNG
マイクロ波プラズマソース.PNG
  • Related Link - https://www.hightec-sys.com/mems/plasmionique.html…

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Engineering technology that connects advanced overseas systems with customer needs [Product Catalog]

Engineering technology that connects advanced overseas systems with customer needs [Product Catalog]

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ハイテック・システムズ

ハイテック・システムズ

Industrial Machinery

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Our company website features information on used equipment related to FPD and semiconductors. ● Main Business Activities Purchase of used semiconductor manufacturing equipment, refurbishment, sales, and setup operations Construction and consulting for semiconductor manufacturing lines Purchase of used FPD manufacturing equipment, refurbishment, sales, and setup operations Construction and consulting for FPD manufacturing lines Contract development, manufacturing, and sales of semiconductor manufacturing equipment and FPD manufacturing equipment Sales of various equipment parts Agency sales of overseas manufactured equipment

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