It is possible to obtain information about high-quality thin films and interfaces! A diagnostic tool for process monitoring.
"Ion Energy Spectroscopy (IES)" is an ion energy spectroscopic method. It provides a diagnostic tool for in-situ real-time process monitoring for PLD/PED systems. High-quality thin film and interface information can be obtained from the energy theory of lasers using a plasma plume. 【Features】 ■ It is possible to obtain high-quality thin film and interface information from the energy theory of lasers using a plasma plume. *For more details, please refer to the PDF document or feel free to contact us.
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