Tohoku University Technology: Scanning mirror and its manufacturing method: T18-504
Torsion bar resistant to torsional fatigue! Vacuum sealing not needed but long life and low cost MEMS laser scanner
The micro-scanner which is being developed to reduce the LiDAR (Light Detection and Ranging) size is a MEMS device that has a mirror and a torsion bar to support it, and scans with the laser beam in 2D. So far, the torsion bar could break in a short time due to hydroxylation/oxidation caused by moisture/oxygen adhesion to its surface. In addition, even a standard protective film is formed on the torsion bar surface, it cannot completely prevent moisture and oxygen adhesion, so the degradation of the torsion bar cannot be avoided. As consequence, vacuum sealing of the mirror device was required to obtain a practical life of the torsion bar. This invention is able to provide a scanning mirror and its manufacturing method that can prevent deterioration from oxidation and hydroxylation of the torsion bar in the atmosphere. This invention is composed of a mirror section and a torsion bar in which the surface is covered with an ALD (Atomic Layer Deposition) layer.
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The revenue generated from technology transfer is reinvested as new research funding for universities and researchers, and is utilized to create further research outcomes. To ensure the smooth operation of this cycle, known as the "Intellectual Creation Cycle," we will vigorously promote technology transfer. The types of seeds we handle include patents, know-how, databases, and programs. We have established a collaborative framework by signing basic technology transfer agreements with the following universities (as of June 1, 2025): Tohoku University, Hirosaki University, Iwate University, Akita University, Fukushima University, Yamagata University, Tohoku Gakuin University, Iwate Medical University, Fukushima Medical University, Aizu University, Miyagi University, Hokkaido University, Muroran Institute of Technology, and Showa Medical University.
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