MEMS mirror for micro-scanner enabling stable control by eliminating nonlinear motion
In recent years, the development of micro-scanner using MEMS scanning mirror has intensified in order to reduce the optical sensor system size such as LiDAR (Light Detection and Ranging). The omnidirectional scanning mirror which is a type of MEMS mirror device, is being researched for its potential application for LiDAR equipped on automated vehicle. One possibility to realize this is to rotate the mirror section by using "gimbal" technology, which has 2 mutually orthogonal axes. However, the rotation around the 2 orthogonal axes interferes with each other, resulting in nonlinear motion, making it impossible to control the mirror movement in a stable manner. This invention can provide an omnidirectional scanning mirror that can stably control the mirror movement. This omnidirectional scanning mirror is composed of a mirror, a rotation axis and a support section. The vertical component of the moment of inertia tensor of this mirror is located within a certain range in order to control mirror stability.
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The revenue generated from technology transfer is reinvested into universities and researchers as new research funding, which is used to create further research outcomes. To ensure the smooth operation of this cycle, known as the "Intellectual Creation Cycle," we will actively promote technology transfer. The types of seeds we handle include patents, know-how, databases, and programs. We have established a collaborative framework by concluding basic technology transfer agreements with the following universities (as of April 1, 2026): - Tohoku University - Hirosaki University - Iwate University - Akita University - Fukushima University - Yamagata University - Tohoku Gakuin University - Iwate Medical University - Fukushima Medical University - Aizu University - Miyagi University - Hokkaido University - Muroran Institute of Technology - Showa Medical University - Asahikawa Medical University
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