[Case Study] Prevention of Rotational Loosening Due to Intense Vibration and Rust Caused by Gas

A case study proposing a solution for rotational looseness under space-saving conditions using Inconel-made lock recoil.

We would like to introduce a case where we proposed "Inconel Lock Recoil" to a semiconductor manufacturing equipment manufacturer. During the polishing process, the wafer that was being supported fell and broke. Upon retrieving the parts, we found rust on the wire insert that was inserted into the female thread. After our proposal and subsequent measures, it has been adopted for mass production, and several years have passed without any occurrence of loosening or rust. 【Case Overview】 ■ Issues - The wafer supported during the polishing process fell and broke. - Rust had developed on the wire insert inserted into the female thread. ■ Requirements for Solving the Issues - It must be an effective countermeasure against rotational loosening. - It must be made of a material with excellent chemical resistance. *For more details, please refer to the related links or feel free to contact us.

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