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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Other semiconductor manufacturing equipment
  6. Piezo Assist Stage

Piezo Assist Stage

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MTPA series

last updated:Oct 25, 2023

キーストンインターナショナル
キーストンインターナショナル
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Manually controlled precision positioning stage

The piezo assist stage is a manual stage that features a minimum resolution of 20 nm and coarse movement (on the order of mm). Its main applications include precise positioning of tables and tasks requiring control of small loads (such as nanoindentation), which can be easily achieved with this manual precision stage. It is compact in size, making it easy to transport, and very simple to use. It is a reasonably priced product that can be introduced on a low budget. (*1 nm = one billionth of a meter)

    Other semiconductor manufacturing equipmentOptical microscopeOther image-related equipment
ピエゾアシストステージ.jpg

Piezo Assist Stage

ピエゾアシストステージ.jpg
ピエゾアシストステージ.jpg PID制御位置決めシステム.jpg
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basic information

Operating Principle of the Piezo Assist Stage ■ Device Configuration The piezo assist stage features a micrometer as its coarse motion mechanism and a piezo assist mechanism for fine motion in both the X and Y axes. The piezo assist mechanism incorporates our company's piezo actuator, which enables precise positioning through its expansion and contraction mechanism. The micrometer has a maximum travel range of 13mm and can achieve positioning with a resolution of 10μm. The piezo assist has a travel range of approximately 35μm and can achieve positioning with a resolution of 20nm. By combining these two adjustment mechanisms, the piezo assist stage enables precise positioning with a maximum travel range of 13mm and a resolution of 20nm.

Price range

P2

Delivery Time

Please contact us for details

Applications/Examples of results

- Autofocus - Confocal microscope - Semiconductor, FPD inspection equipment - Image processing equipment - Laser processing - Interferometer shape measurement

Detailed information

  • ピエゾアシストステージ.png

    This product offers intuitive operation simply by turning the knob, and it is lightweight and compact. Additionally, it achieves both fine resolution and a wide range of motion.

Company information

キーストンインターナショナル

キーストンインターナショナル

Electronic Components and Semiconductors

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Our staff, equipped with specialized skills and marketing capabilities, searches for the latest cutting-edge equipment, including lasers, from around the world to provide to everyone in Japan. We wish to continue walking together with you into the 21st century. This is the wish of Keystone International.

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The related categories of Other semiconductor manufacturing equipment

  • Manufacturing and processing machinery
  • Semiconductor Manufacturing Equipment
  • Other semiconductor manufacturing equipment
  • Image Processing
  • Other image-related equipment
  • Measurement and Analysis
  • Microscopes
  • Optical microscope
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  • #Actuator
  • #Assist Stage
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