Reduce initial implementation costs and enable high performance through expansion! Upgrade according to the research stage.
The "FDS/FRS Series" is a tabletop magnetron sputtering device for research and development, equipped with the necessary functions. The basic specifications consist of a DC sputter/single cathode/rotary pump configuration for metal thin film sputtering. With expansion options such as RF conversion, additional cathodes, and turbo molecular pump specifications, it is possible to upgrade according to the research stage. 【Features】 ■ Keeps initial introduction costs low while allowing for high performance upgrades later ■ Comes with an MFC for argon in the basic specifications, enabling precise control of gas flow ■ Adopts a deposition-up method to prevent dust from adhering to the sample during film formation ■ Utilizes a high vacuum-sealing SUS chamber despite being a tabletop type *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Specifications】 ＜FDS-1C-160R Sputtering System＞ ■ Sputtering Power Supply: DC500V/0.8A ■ Cathode: φ2 inch/Magnetron Cathode ■ Applicable Targets: Au/Ag/Pt/Pd/Ni/Cu/W/Cr/Ti/Ta/Mo/etc. ■ Vacuum Exhaust System: Rotary Pump 162L/min ■ Vacuum Gauge: Pirani Gauge ■ Gas Flow Control: MFC for Argon 20sccm *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
[Applications and Achievements] ■ Development of electronic devices, solid nanostructure devices, various sensors, and various batteries. *For more details, please refer to the PDF document or feel free to contact us.*
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FKD Factory Co., Ltd. will assist you in bringing your ideas to life. "I want to create a new type of device." "I want to advance my research stage and consider new experimental equipment and materials." "I want to independently develop a device and aim for commercialization." We will propose concrete directions based on your spontaneous ideas, drawing from our extensive experience and unique perspective. There are no limitations. We support cutting-edge research and manufacturing with free-thinking creativity.