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  6. Three-dimensional structure observation of MEMS devices.

Three-dimensional structure observation of MEMS devices.

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last updated:Dec 28, 2023

東芝ナノアナリシス
東芝ナノアナリシス
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Achieve high-resolution and high-contrast observation! Non-destructive 3D observation is possible.

The "MEMS" structure, which has a three-dimensional and movable component, is sealed in a hollow form. To observe this structure as it is, it is necessary to conduct observations without any processing such as opening it. The 3D X-ray microscope (X-ray CT) allows for non-destructive three-dimensional observation and is effective for quality analysis, defect analysis, and reverse engineering. 【Features of the 3D X-ray Microscope】 ■ Enables non-destructive three-dimensional observation of the internal structure of the object ■ By magnifying the X-rays that have passed through the sample with optical lenses, high-resolution and high-contrast observations are possible *For more details, please refer to the PDF document or feel free to contact us.

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MEMSデバイスの3次元構造観察1.PNG

Three-dimensional structure observation of MEMS devices.

MEMSデバイスの3次元構造観察1.PNG
MEMSデバイスの3次元構造観察1.PNG
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Three-dimensional structure observation of MEMS devices.

Three-dimensional structure observation of MEMS devices.

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東芝ナノアナリシス

東芝ナノアナリシス

Testing, Analysis and Measurement

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Our company offers contract analysis services. Since our establishment in August 2002, we have utilized reliable analysis and measurement technologies along with state-of-the-art equipment to provide optimal nano-level microfabrication, analysis, evaluation of reliability, environmental safety chemical analysis, and service solutions for a wide range of markets centered around semiconductors, liquid crystals, metals, and new materials. Please feel free to contact us if you have any requests.

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