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  6. Fluororesin coating for semiconductor manufacturing equipment

Fluororesin coating for semiconductor manufacturing equipment

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last updated:Mar 22, 2024

サーフ工業
サーフ工業
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Protecting the substrate from chemical solutions and corrosive gases, suitable for various devices such as cleaning and adhesion prevention!

Our company's fluoropolymer coating can be used for a wide range of applications, including chemical resistance, particle reduction, cleanability, water repellency, prevention of metal ion contamination, fire resistance, and flame retardancy. Thanks to the non-stick, release, and water-repellent properties of fluoropolymers, the coating's surface repels water and oil, forming a film that prevents most substances from adhering. It is effective in reducing cleaning time, minimizing cleaning solution usage, preventing metal ion leaching, and avoiding contamination from residues. 【Benefits】 ■ Increased productivity ■ Improved product quality ■ Reduced maintenance time and costs *For more details, please refer to the related links or feel free to contact us.

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非粘着性・離型性.jpg

Fluororesin coating for semiconductor manufacturing equipment

非粘着性・離型性.jpg
非粘着性・離型性.jpg
  • Related Link - https://www.surfkogyo.co.jp/cnt_2/

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basic information

Thin film coating 0.01μm to 50μm: For various equipment requiring water and oil repellency, non-stick properties, and slip characteristics. Thick film coating 300 to 1500μm: A pinhole-free coating protects various equipment requiring corrosion resistance against strong acids and strong alkalis.

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Applications/Examples of results

[Examples of Achievements] FM certified duct piping CMP polishing equipment Photoresist manufacturing tank Ultrapure water production equipment Wafer transport carrier Wafer cleaning chamber Various parts for steppers Suction plates and others

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Thick film corrosion-resistant lining, fluororesin baked lining.

Thick film corrosion-resistant lining, fluororesin baked lining.

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Fluororesin Coating "TC Series"

Fluororesin Coating "TC Series"

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Choose from applications: 'Fluororesin Coating'

Choose from applications: 'Fluororesin Coating'

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サーフ工業

サーフ工業

Resin/Plastic

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Surface treatment is generally a type of machining method performed to enhance the properties of the material's surface. However, our company focuses on various coatings and also challenges a wide range of themes, including polishing, plating, heat treatment, thermal spraying, and deposition.

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