Metal seal adoption case: Chemical substance canister for semiconductor manufacturing

Metal seal for canisters. Good news for substances that cannot use resin or elastomer seal materials! By adopting metal seals, helium leak tightness has been achieved.

We would like to introduce a case where our "HELICOFLEX Delta Seal" was adopted for seals used in canisters by a chemical company. The specifications for the chemical company's canister seals required reliability to achieve helium leak tightness under both vacuum and positive pressure, as well as excellent durability, which ruled out the use of resin or elastomer materials. After adoption, helium leak tightness was achieved, and the design tightening pressure was lower than usual, resulting in reduced bolt load and a decrease in the number of bolts for the canister cover, which has limited space. 【Case Overview】 ■ Challenge - Desire to repeatedly transport chemicals with helium leak tightness ■ Results - Achieved helium leak tightness - Reduced bolt load due to lower design tightening pressure, leading to a decrease in the number of bolts for the canister cover - Also serves as a solution for PFAS measures *For more details, please refer to the PDF document or feel free to contact us.

SealingOther semiconductor manufacturing equipmentChemicals