It is a device that automatically supplies semiconductor wafers to the inspection machine. It employs a vibration isolation mechanism to prevent vibrations during inspection.
Remove the wafer from the carrier, perform positional correction with pre-alignment, and supply the wafer to the inspection unit. After inspection, automatically eject the wafer and store it back in the original position of the carrier. ◇ Pre-alignment mechanism: XY axis stroke: ±2mm or more, θ axis stroke angle: ±15 degrees or more, suction table We provide a consistent service from development and design to assembly and maintenance after delivery. We add value to important equipment and support our customers in energy saving and labor reduction.
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basic information
■FFU (Clean Fan Unit) equipped, fully sealed clean environment inspection. ■Vibration isolation mechanism ■Automatic detection function for the presence or absence of wafers ■Pre-alignment mechanism: XY axis stroke: ±2mm or more, θ axis stroke angle: ±15 degrees or more, suction table. ■Wafer exchange tact time: 60 seconds ■Positive pressure specification: approximately 26.6 x 10³ Pa ■QR code reading function: lot information
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It is a device that automatically supplies semiconductor wafers to the inspection machine.
Company information
Our company manufactures custom control devices for customers advancing automation and labor-saving in FA, including hardware and software design and production, as well as electronic circuit design, for applications such as automobiles. We also create FA equipment tailored to specific needs, including those for semiconductor manufacturing, card production, image inspection, and transport devices. To bring our customers' ideas to life, we provide a consistent service from development, design, assembly adjustment, to after-sales maintenance, and we have garnered support from a wide range of customers in the FA industry. We respond to various customer requests, such as developing equipment not available in the market, creating compact systems with carefully selected minimal functions, and modifying existing equipment. Please leave the support for your energy-saving and labor-saving initiatives to our skilled engineers, who have accumulated knowledge and experience!
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