Space-saving multi-step wet processor
The RENA multi-step wet processor, Revolution, employs a rotary robot design and precision engineering, enhancing the operability of process control. It features a powerful and flexible design while being space-saving. The Advancer series is a semi-automatic wet processor with modular and easy-to-install robotic transport. 【Space-saving Rotary Robot】 ■ 2-5 positions, 2-axis design ■ Multiple process tanks can be installed ■ Compatible with 150-300mm wafers ■ Tank cover (optional) ■ Pressure or optical tank level monitoring 【Others】 ■ Versatile applications for etching, stripping, and cleaning ■ Easy-to-understand recipe structure ■ Options for chemical addition, injection, and filling ■ Acid and dissolution models ■ Up to five tanks can be installed ■ Marangoni drying can be integrated 【Dedicated Software IDX Flexware for Yield Improvement】 ■ High flexibility ■ High degree of freedom ■ Accuracy ■ SECS/GEM compliant ■ Touch screen UI ■ Simultaneous processing of multiple lots and recipes
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We offer proposals for semiconductor manufacturing equipment and its components, tailored to customer needs from new to used items. In addition to importing and selling as an authorized distributor for overseas manufacturers, we also provide refurbished products with warranty and after-sales service. Furthermore, we can handle the purchase of excess equipment as well as relocation and removal. Our staff resides in the area, so please consult us for support overseas, particularly in Asia. We leverage our experience to comprehensively support your production operations.