Appropriate inception for the transition from R&D to pilot production.
■ Achieve a stable process for mass production base process development ■ Highly flexible software enabling the shortest process development ■ Equipped with two tanks as standard specifications to support diverse processes ■ Excellent uniformity even at an etching rate of 100 Å/Sec ■ Transport system supports both manual and automatic operation ■ Initial investment is minimized ■ Space-saving ■ Suitable for small lot production ■ Processes for acids and solvents ■ A complex transport system that cannot be achieved with a spinner ■ Etching uniformity surpasses that of batch types ■ Up to 2 to 4 tanks can be installed ■ Compatible with 200mm wafers ■ Up to two movable spray arms can be installed for individual chemical systems ■ Bottom spray nozzles prepared for both pure water and N2 ■ Various chemicals supplied from the outside to the rear of the unit, controlling particles with high-speed cooling etching using spin drying
Inquire About This Product
basic information
For more details, please refer to the external link or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the external link or feel free to contact us.
catalog（1）
Download All Catalogs
Company information
We offer proposals for semiconductor manufacturing equipment and its components, tailored to customer needs from new to used items. In addition to importing and selling as an authorized distributor for overseas manufacturers, we also provide refurbished products with warranty and after-sales service. Furthermore, we can handle the purchase of excess equipment as well as relocation and removal. Our staff resides in the area, so please consult us for support overseas, particularly in Asia. We leverage our experience to comprehensively support your production operations.