Fast and accurate semiconductor manufacturing process.
High flexibility and precise process control This product is an automatic wet processing system for 200mm or 300mm wafers that can be used with or without carriers, designed for accurate process monitoring, high productivity, and flexibility. RENA's Semi Processing Platform offers the flexibility to be adjusted according to customer requirements, delivering maximum production quality and manufacturability. Notably, it features a flexible carrierless handling system that allows for simultaneous processing of wafers with varying thicknesses.
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basic information
【Specifications】 ■ Application: Cleaning (SPM, SC1, SC2, DFH/O3, etc.), Drying ■ Process Control: Chemical/Ozone concentration monitor, pure resistivity, chemical control ■ Substrate Material: Silicon, SiC, GaAs, GaN, InP, Glass, Sapphire ■ Film Thickness: 500 to 2000 μm ■ Enclosure: PP, equivalent to FM4910, stainless steel frame ■ Dimensions: Width 2200 mm, Height 3600 mm (including flow box) ■ Module Dimensions: Wafer Size 200 mm / 8” 300 mm / 12” 2 Tanks 1400 mm 1600 mm 3 Tanks 2100 mm 2400 mm ■ Options: Fully automatic loader/unloader buffer station, custom process carrier, chemical concentration supply system
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We offer proposals for semiconductor manufacturing equipment and its components, tailored to customer needs from new to used items. In addition to importing and selling as an authorized distributor for overseas manufacturers, we also provide refurbished products with warranty and after-sales service. Furthermore, we can handle the purchase of excess equipment as well as relocation and removal. Our staff resides in the area, so please consult us for support overseas, particularly in Asia. We leverage our experience to comprehensively support your production operations.