[Measurement Example] Evaluating the Thickness of Metal Thin Films with Heat [TM]
Thermal Microscope TM3
By measuring thermal properties, the thickness of the thin film can be evaluated!
By using the Bethel Corporation's thermal microscope TM3, the "thickness of thin films" can be evaluated.
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basic information
When evaluating the thickness of thin films, we use a surface roughness meter for assessment. When using a surface roughness meter, a mask is applied to the substrate on which the thin film is deposited, creating an area that is not coated, and we examine the step between the coated and uncoated areas. For transparent thin films, measurement can also be performed using light interference, but for opaque films, it is generally thought that using a surface roughness meter or observing with a cross-sectional microscope is common. Now, our thermal property microscope TM3 is a device that measures thermal permeability and thermal conductivity, but the measurement results can vary depending on the thickness of the thin film. Since distance is included in the units, this is to be expected... In the experiment, we measured a Mo thin film deposited on borosilicate glass. The thickness was measured in the range of 50nm to 130nm, and changes in the measurement values were obtained, suggesting that changes in thickness can be evaluated with a resolution of several tens of nm. The spatial resolution is considered to be almost equivalent to the laser spot diameter of 3μm, which gives it features not found in conventional methods.
Price information
The price varies depending on the quantity and difficulty, so please contact us for details.
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※The quantity and difficulty may vary, so please contact us for details.
Applications/Examples of results
Relative thickness evaluation of silicon oxide films for semiconductors Relative thickness evaluation of sputtered metal thin films
Company information
Leveraging the assembly technology cultivated over many years, we have expanded our business areas to include the development of precision component assembly, thermal property measurement devices, contract measurement services, and the development of medical and dental plastic products equipped with clean rooms. We deepen and integrate our "original products" from a unique manufacturing perspective, consolidating our know-how and technology. With "speedy decision-making and execution," which is a strength unique to Bethel, we provide high-quality products under the "Made by BETHEL" label. Our wish at Bethel is for our customers who use Bethel products to be satisfied with our products, manufacturing, and services, and to feel that they made the right choice in trusting our company. Furthermore, we hope that the satisfaction of our customers will lead to the happiness of each employee who works here.
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