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This device is a single-wafer cleaning system compatible with SiC wafers of φ150mm (6") and φ200mm (8"). Wafers are loaded by the operator into a cassette containing 25 wafers on the LD side. After cleaning, the wafers are stored in a clean cassette set on the ULD side. The process is as follows: LD (underwater) → both-side brush scrubbing → both-side brush scrubbing → ultrasonic shower cleaning → spin drying → ULD (in air).
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basic information
This device is a single-wafer cleaning system for SiC wafers compatible with φ150mm (6") and φ200mm (8"). Wafers are set by the operator on the LD side in a cassette that holds 25 wafers. After cleaning, the wafers are stored in a clean cassette set on the ULD side. Process: LD (underwater) → Double-sided brush scrub → Double-sided brush scrub → Ultrasonic shower cleaning → Spin drying → ULD (in air). [Processed Items] 1. SiC wafers φ150mm and φ200mm with notch and orientation flat Diameter φ150mm ±0.2mm, φ200mm ±0.2mm Thickness 385–600μm Warp less than 40μm Contactable range is from the edge and within 2mm of the outer circumference 2. Cassette LD side cassette: SEMI standard product → PFA cassette (holds 25 wafers) ULD side cassette: SEMI standard product → PP cassette (holds 25 wafers) Storage pitch for φ150mm (6") wafers: 4.7625mm Storage pitch for φ200mm (8") wafers: 6.35mm [Throughput] Cycle time: 60 seconds per wafer for φ150mm Cycle time: 45 seconds per wafer for φ200mm
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Company information
PHT Corporation is a company engaged in the semiconductor transport system business and semiconductor cleaning equipment business. Features PHT will actively operate globally as a niche top company in the semiconductor industry, specializing in wafer automatic peeling equipment (peeling cleaning machines). PHT has proposed transport and cleaning solutions for compound semiconductors, including next-generation SiC (silicon carbide) and GaN (gallium nitride) materials, utilizing silicon wafer transport and laser processing technology. We are particularly proactive in approaching the power semiconductor market. Our company is creating a comprehensive solution provision system for semiconductor manufacturing equipment aimed at energy conservation (electric vehicles, power control).