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  6. TOC Analyzer Sievers M9e for the Semiconductor/Electronics Industry

TOC Analyzer Sievers M9e for the Semiconductor/Electronics Industry

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Sievers M9e

last updated:May 26, 2025

セントラル科学
セントラル科学
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Continuous monitoring of ultra-low concentration TOC in ultrapure water for the semiconductor and electronics industries! Rapid measurement across a wide range!

The Sievers M9e can accommodate a variety of applications thanks to its unique gas-permeable membrane conductivity measurement method and wide measurement range (0.03 ppb to 50 ppm). The optional turbo mode (analysis time of 4 seconds) is useful for monitoring recovery water. Features of the Sievers M9e: - Matching of measurement deviations - Stability in ultra-low concentration ranges - Automatic operation (calibration / verification / data analysis, etc.) - 12 months of calibration stability - Three models to choose from based on application (laboratory type / portable type / online type) - Sample conductivity measurement function (optional) allows simultaneous measurement of TOC and conductivity - Auto-sampler (optional) can automatically analyze up to 63 samples (40mL each).

    Analytical Equipment and Devices
M9.png

TOC Analyzer Sievers M9e for the Semiconductor/Electronics Industry

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M9.png オートサンプラーのみ3.JPG
  • Central Science Corporation HP
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basic information

- Common Specifications (Normal Mode & Turbo Mode) Measurement Principle: Wet UV Oxidation + Gas Permeable Membrane Conductivity Measurement Method Sample Water Flow Rate: 50 mL/min or more Sample Temperature: 5–95°C Sample Water Pressure: Up to 100 psig Interfering Substances: Not affected by coexisting ions other than organic substances Calibration Stability: Stable for normally 12 months Display Digits: 3 digits - Normal Mode Measurement Range: 0.03 ppb to 50 ppm TOC Accuracy: ± 2% or ±0.5 ppb, whichever is greater Reproducibility: RSD less than 1% Measurement Time: 2 minutes Flow Rate Inside Analyzer: 0.5 mL/min - Turbo Mode Measurement Range: 0.2 ppb to 10 ppm TOC Accuracy: Within ± 3% Reproducibility: RSD less than 2% Measurement Time: 4 seconds Flow Rate Inside Analyzer: 1.1 mL/min

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Applications/Examples of results

Ultra-pure water production equipment for the semiconductor industry: raw water/RO water/recovery water Equipment cleaning evaluation Inorganic acid purity management Plating solution contamination evaluation Water treatment membrane performance evaluation Cooling water/boiler water leak detection

Detailed information

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    - Sievers' unique gas permeable membrane conductivity measurement method In the TOC measurement method for conductivity, the conductivity indicated by the carbon dioxide (carbonate ions) generated after the oxidation and decomposition of organic matter is measured to calculate the carbon concentration. The Sievers M500e employs a "gas permeable membrane module," which uses a thin Teflon film to separate carbon dioxide from the sample water into the pure water line within the analyzer, enabling accurate TOC measurements by eliminating the influence of other ions.

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Model number overview
SPRD77130-01 TOC Meter M9e Laboratory Type
SPRD77230-01 TOC Meter M9e Portable Type
SPRD77330-01 TOC Meter M9e Online Type

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Control of condensate recovery through TOC monitoring

Control of condensate recovery through TOC monitoring

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Online TOC Meter M500e Product Catalog

Online TOC Meter M500e Product Catalog

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Sievers product lineup for the semiconductor industry

Sievers product lineup for the semiconductor industry

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Water quality monitoring of ultrapure water production systems for semiconductors (TOC & boron)

Water quality monitoring of ultrapure water production systems for semiconductors (TOC & boron)

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Sievers TOC Sensor CheckPoint Pharma

Sievers TOC Sensor CheckPoint Pharma

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Sievers TOC Sensor CheckPoint e

Sievers TOC Sensor CheckPoint e

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Monitoring of organic substances in industrial water using the Sievers TOC analyzer.

Monitoring of organic substances in industrial water using the Sievers TOC analyzer.

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TOC Analyzer Sievers M9e for the Semiconductor/Electronics Industry

TOC Analyzer Sievers M9e for the Semiconductor/Electronics Industry

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Comparison of measurement principles of TOC (Total Organic Carbon) analysis (combustion catalyst oxidation method and gas permeable membrane conductivity measurement method)

Comparison of measurement principles of TOC (Total Organic Carbon) analysis (combustion catalyst oxidation method and gas permeable membrane conductivity measurement method)

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セントラル科学

セントラル科学

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Since our establishment in 1967, we have been dedicated to the development and dissemination of water quality measurement devices that anyone can use quickly, easily, and with high precision. In today's world, where the effective use of water, a limited resource, is required alongside environmental conservation, we aim to be a total solution provider that responds to all water environments by utilizing our water quality measurement devices, technology, and services. Furthermore, leveraging the latest technology and years of know-how, we are committed to delivering user-friendly and reliable water quality measurement devices more affordably, quickly, and widely.

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