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  6. [Case Study] High-Density Substrate Inspection in Semiconductor Manufacturing Equipment

[Case Study] High-Density Substrate Inspection in Semiconductor Manufacturing Equipment

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TAKAYA APT Series

last updated:Dec 19, 2025

TAKAYA Corporation
TAKAYA Corporation
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Please utilize Takaya's flying probe tester in the high-density substrate inspection process for semiconductor manufacturing equipment.

High-precision inspections compliant with IEC60384-1 are possible. The characteristics of electronic components such as fixed capacitors are guaranteed according to international standards, achieving improved quality for high-density boards. We flexibly respond to design changes and prototypes, providing cost-effective inspection solutions. 【Implementation Achievements】 - Conducted inspections of high-density mounted boards, achieving quality assurance tailored to precision boards. - Enabled inspections compliant with the IEC60384-1 standard (performance standards for fixed capacitors), ensuring product quality in line with international standards. 【Customer Challenges】 Narrow Pitch Between Components: In high-density boards, the space between components is extremely narrow, making physical contact difficult with traditional jig-based inspections. There is a potential decrease in inspection accuracy, especially in narrow pitch areas below 0.2mm and with high pin count components. Need for Compliance with Standards: As compliance with international standards represented by IEC60384-1 is required, a system that reliably implements inspection items based on these standards is necessary. It is particularly important to measure the characteristics of fixed capacitors and special components accurately and quickly. Limits of Inspection Coverage: In designs where the number of test points has decreased, there is a risk of reduced inspection coverage due to insufficient physical access.

    Circuit Board Inspection Equipment
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[Case Study] High-Density Substrate Inspection in Semiconductor Manufacturing Equipment

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basic information

**Benefits of Introducing Flying Probe Testers** **IEC60384-1 Compliant Testing:** Using flying probe testers, inspections are conducted in accordance with the requirements of IEC60384-1 (such as capacitance values, withstand voltage, leakage current, insulation resistance, etc.). Characteristic testing of fixed capacitors and other electronic components based on international standards is possible. **Narrow Pitch Compatible Flying Probe Testers:** Probing with a pitch of 0.15mm is possible, complying with the stringent measurement standards of IEC60384-1. High-precision measurement technology covers the inspection of narrow pitch and multilayer boards. **High Flexibility:** No fixtures are required, allowing for rapid adaptation to design changes or modifications in the manufacturing process. Inspections can be conducted in a short period even for small production runs or prototype boards. **Improved Reliability through Compliance with Standards:** By adhering to IEC60384-1, product reliability in the international market is strengthened. Guaranteeing compliance with standards enables quality assurance that meets customer requirements. **Enhanced Inspection Coverage:** Detailed inspections are possible, including internal wiring of narrow pitch components and multilayer boards. Detection of minute defects (such as shorts, opens, and abnormal resistance values) is achieved.

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**Effects of Implementation** Response to International Standards: Enables inspections based on international standards, including IEC60384-1, ensuring quality assurance for export products. Enhances the reliability of electronic components, including capacitors, and improves competitiveness in the global market. Realization of High-Precision Inspections: Capable of handling narrow pitch and high-density mounted boards, accurately identifying defects. Meets the high-quality standards required for semiconductor manufacturing equipment. Cost Reduction and Efficiency Improvement: Reduces costs by eliminating the need for fixtures and shortens inspection time. Keeps initial investment low while maximizing cost performance in low-volume, high-variety production. **Application Examples** Wafer Process Boards: Conducts characteristic measurements of fixed capacitors in compliance with IEC60384-1. Detects defects in wafer processing boards that require high precision. Test Equipment Boards: Inspects fine defects on high-density mounted boards. Semiconductor Exposure Equipment Boards: Conducts detailed inspections of boards that include narrow pitch components and special designs.

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Flying Probe Tester APT-2400F

Flying Probe Tester APT-2400F

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[Press Release] Takaya Corporation Announces New Models of Flying Probe Tester "APT-2400F/APT-2600FD Series"

[Press Release] Takaya Corporation Announces New Models of Flying Probe Tester "APT-2400F/APT-2600FD Series"

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TAKAYA

TAKAYA Corporation

Industrial Electrical Equipment

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Founded in 1894 as a textile company, Takaya Textile expanded and established its electronics division in 1966, beginning the assembly of transistor radios. Currently, in addition to contract manufacturing services (EMS) related to electronic devices, the company actively manufactures and sells in-circuit testers (printed circuit board inspection devices), RFID-related equipment (technology that enables information exchange through short-range wireless communication from IC information tags), and engages in IT consulting and system solutions, among various electronics businesses both domestically and internationally. We will continue to evolve as a corporate group that contributes to the development of society, with textiles and electronics as our two pillars.

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