Can be used for various applications! Such as patterning of organic devices and cutting of metal wiring for ICs, etc.
We provide a YAG laser thin film processing system that is widely used for semiconductor development, failure analysis, and repair applications such as FPD. It offers stable, high-quality laser irradiation at both high and low power, significantly reducing the impact on the substrate and surrounding areas, and enabling high-quality laser processing on materials different from conventional ones. **Main Applications:** - Removal of protective films and organic thin films using DUV lasers - Cutting and removal of IC metal wiring such as gold and aluminum, exposing underlying patterns - Drilling for EB testers and probing - Pre-treatment for FIB (such as pre-processing), pre-treatment for SEM, TEM, etc. (such as marking) - Precise transfer of laser marks from the back surface of samples to the front using failure analysis equipment - Simple photomask creation and photomask modification - Correction of various defects in FPDs: CF protrusion correction, OC foreign matter protrusion correction, ITO short cutting, etc. - Direct patterning on organic films and correction of pattern collapse - Spot annealing - Integration into electrical measurement systems for defect and failure analysis, etc. We can customize and provide integration into various devices such as semi-auto systems and probers for a wide range of applications.
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basic information
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Applications/Examples of results
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Detailed information
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Removal of BCB, metal layer, SiO2, and Si3N4.
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SEM image after upper layer removal
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Marking on the metal layer of power devices
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Polyimide film removal
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Company information
TNS Systems LLC is a company that delivers customized systems for semiconductor and FPD-related manufacturing and inspection equipment according to your needs. Our main products include failure analysis equipment used for the analysis of semiconductors, YAG laser thin film processing systems for processing thin films on sample surfaces, and electrical characteristic evaluation systems primarily based on probers. These products are used in research institutions and departments for development, analysis, and quality assurance, and have received high praise. Please feel free to contact us if you have any inquiries.